期刊
IEEE TRANSACTIONS ON ELECTRON DEVICES
卷 68, 期 4, 页码 1778-1783出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/TED.2021.3058114
关键词
Enhancement-mode metal-insulator-semiconductor high-electron-mobility transistor (E-mode MIS-HEMT); GaN power device; reverse conduction; Schottky rectifier
资金
- National Natural Science Foundation of China [61534007, 61527816, 61822407, 62074161, 11634002, 61631021]
- Key Research Program of Frontier Sciences, Chinese Academy of Sciences (CAS) [QYZDB-SSW-JSC012]
- National Key Research and Development Program of China [2016YFB0400105, 2017YFB0403000]
- Youth Innovation Promotion Association of CAS
- University of Chinese Academy of Sciences
- Key-Area Research and Development Program of Guangdong Province [2019B010128001]
- Opening Project of Key Laboratory of Microelectronic Devices and Integrated Technology, Institute of Microelectronics, CAS
By integrating an enhancement-mode metal-insulator-semiconductor high-electron-mobility transistor (MIS-HEMT) with a high-performance lateral Schottky barrier controlled Schottky (LSBS) rectifier on an ultrathin-barrier AlGaN/GaN heterostructure grown on a Si substrate, a monolithic integrated E-mode power device with a state-of-the-art reverse conduction voltage of 0.455 V and a threshold voltage of 1.55 V was achieved, showing a small temperature variation of 0.66% from 0 degrees C to 150 degrees C.
Integration of an enhancement-mode (E-mode) metal-insulator-semiconductor high-electron-mobility transistor (MIS-HEMT) with a high-performance lateral Schottky barrier controlled Schottky (LSBS) rectifier in a compact layout is fabricated on an ultrathin-barrier AlGaN/GaN heterostructure grown on Si substrate. The state-of-the-art reverse conduction voltage (V-rev) of 0.455 V was achieved in the monolithic integrated E-mode power device with a threshold voltage of 1.55 V. V-rev exhibited a tiny temperature variation of 0.66% from 0 degrees C to 150 degrees C compared with that of 157% for the controlled E-mode HEMT.
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