期刊
IEEE ELECTRON DEVICE LETTERS
卷 42, 期 4, 页码 617-620出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/LED.2021.3060589
关键词
Multilevel; ferroelectric; FeFET
资金
- Ministry of Science and Technology (MOST) [109-2218-E-003-003, 109-2622-8-002-003]
- Taiwan Semiconductor Research Institute (TSRI), Taiwan
A double-HfZrO2 (HZO) FeFET with nonidentical ferroelectric thicknesses demonstrated lower drive voltage, longer endurance, and retention time. Inserting an insulator to separate the ferroelectric layers improved the memory window for multilevel cell applications. Double-HZO showed lower error rate and 600 times improvement compared to single-HZO, making it a potential MLC for high-density NVM applications.
A double-HZO (HfZrO2) FeFET (ferroelectric FET) with nonidentical ferroelectric thicknesses is experimentally demonstrated with as low as vertical bar V-P/E vertical bar = 5 V, 2-bit endurance > 10(5) cycles and retention > 10 4 s. Inserting an insulator to separate the ferroelectric layers and avoid the monoclinic formation of a thick Fe-HZO (ferroelectric-HZO) is a useful method to enhance the MW (memory window) for MLC (multilevel cell) applications. Double-HZO has a lower ER (error rate) and shows a 600X improvement compared to single-HZO. The stacked HZO FeFET has potential as an MLC for high-density NVM (nonvolatile memory) applications.
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