期刊
IEEE ELECTRON DEVICE LETTERS
卷 42, 期 4, 页码 481-484出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/LED.2021.3058659
关键词
Metals; Ohmic contacts; MODFETs; HEMTs; Logic gates; Gallium nitride; Silicon; GaN-based HEMTs; ohmic contacts; morphology; high temperature annealing; breakdown voltage
资金
- Science and Technologies Plan Projects of Guangdong Province [2016B010123004, 2017B010112003, 2020B010171001]
- Science and Technologies Plan Projects of Guangzhou City [201604046021, 201905010001]
- Science and Technology Development Special Fund Projects of Zhongshan City [2019AG014, 2019AG042, 2020AG023]
In this study, Ti/Al/Ni/Ti metal stack was proposed to enhance the breakdown voltage of GaN-based HEMTs. The use of magnetron sputtering technique ensured better particle filling on the sidewall, resulting in a more uniform electric-field distribution near the ohmic contacts even after high temperature annealing. Compared to Ti/Al/Ni/Au ohmic contacts, HEMTs with Ti/Al/Ni/Ti ohmic contacts exhibited higher breakdown voltage and improved uniformity and repeatability.
We propose the Ti/Al/Ni/Ti ohmic contacts to improve the breakdown voltage (V-BD) of GaN-based high electron mobility transistors (HEMTs). Using the same photolithography process, the first Ti/Al metal stack and the second Ni/Ti metal stack were achieved by electron beam (EB) evaporation and magnetron sputter, respectively. Attributed to the better particle filling on the sidewall by magnetron sputtering, the second Ni/Ti metal stack completely wraps the first Ti/Al metal stack and extends to both sides after a lift-off process. Even after high temperature annealing (HTA), the Ti/Al/Ni/Ti metal stack can keep smooth edge acuity and surface morphology, resulting in a uniform electric-field distribution near the ohmic contacts. Compared with Ti/Al/Ni/Au ohmic contacts, HEMTs with Ti/Al/Ni/Ti ohmic contacts have higher V-BD and can improve the uniformity as well as repeatability of V-BD.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据