期刊
IEEE ELECTRON DEVICE LETTERS
卷 42, 期 4, 页码 525-528出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/LED.2021.3062422
关键词
Annealing; Films; Thin film transistors; Performance evaluation; Temperature measurement; Surface morphology; Logic gates; Solution-processed; indium-zinc-oxide (IZO); thin-film transistors (TFTs); one-volt operation
资金
- National Natural Science Foundation of China [11974063]
- China Postdoctoral Science Foundation [2020M683242]
- Chongqing Special Postdoctoral Science Foundation [cstc2020jcyj-bshX0123]
The study showed that IZO films annealed at 350 degrees Celsius exhibit the best performance, and with the use of a thin AlxOy layer as the gate dielectric, high-performance IZO TFTs were demonstrated. These devices have a high current on/off ratio, high mobility, and are close to the theoretical limit of subthreshold swing.
In this letter, we report solution-processed, high-performance Indium-Zinc-Oxide (IZO) thin-film transistors (TFTs). The annealing temperature of IZO films are studied and found that devices annealed at 350 degrees C exhibit the best performance. With the use of a thin AlxOy layer as the gate dielectric, one-volt IZO TFTs are demonstrated, showing a high current on/off ratio of > 10(5), a high mobility over 10 cm(2)/Vs, and a low subthreshold swing (SS) of 83 mV/dec, which is fairly close to the theoretical limit of SS at 300 K. Such a high device performance is also found comparable to those deposited using vacuum-based methods. As a result, the presented devices might possess a great potential in low-cost, low-power electronics.
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