4.6 Article

High-throughput bend-strengths of ultra-small polysilicon MEMS components

相关参考文献

注意:仅列出部分参考文献,下载原文获取全部文献信息。
Article Materials Science, Multidisciplinary

Dislocation-controlled microscopic mechanical phenomena in single crystal silicon under bending stress at room temperature

Hiroshi Yamaguchi et al.

JOURNAL OF MATERIALS SCIENCE (2020)

Article Multidisciplinary Sciences

Time-dependent plasticity in silicon microbeams mediated dislocation nucleation

Mohamed Elhebeary et al.

PROCEEDINGS OF THE NATIONAL ACADEMY OF SCIENCES OF THE UNITED STATES OF AMERICA (2020)

Article Engineering, Electrical & Electronic

Shoulder fillet effects in strength distributions of microelectromechanical system components

Frank W. DelRio et al.

JOURNAL OF MICROMECHANICS AND MICROENGINEERING (2020)

Article Materials Science, Multidisciplinary

Material Flaw Populations and Component Strength Distributions in the Context of the Weibull Function

R. F. Cook et al.

EXPERIMENTAL MECHANICS (2019)

Article Nanoscience & Nanotechnology

Predicting strength distributions of MEMS structures using flaw size and spatial density

Robert F. Cook et al.

MICROSYSTEMS & NANOENGINEERING (2019)

Article Materials Science, Ceramics

Determination of ceramic flaw populations from component strengths

Robert F. Cook et al.

JOURNAL OF THE AMERICAN CERAMIC SOCIETY (2019)

Article Engineering, Mechanical

A novel MEMS stage for in-situ thermomechanical testing of single crystal silicon microbeams under bending

Mohamed Elhebeary et al.

EXTREME MECHANICS LETTERS (2018)

Article Nanoscience & Nanotechnology

Temperature dependent fracture initiation in microscale silicon

Eric D. Hintsala et al.

SCRIPTA MATERIALIA (2017)

Article Materials Science, Multidisciplinary

Microscopic strength of silicon particles in an aluminium-silicon alloy

M. G. Mueller et al.

ACTA MATERIALIA (2016)

Article Nanoscience & Nanotechnology

Near-theoretical fracture strengths in native and oxidized silicon nanowires

Frank W. DelRio et al.

NANOTECHNOLOGY (2016)

Article Chemistry, Analytical

Micromechanical Characterization of Polysilicon Films through On-Chip Tests

Ramin Mirzazadeh et al.

SENSORS (2016)

Review Physics, Applied

Fracture strength of micro- and nano-scale silicon components

Frank W. DelRio et al.

APPLIED PHYSICS REVIEWS (2015)

Article Engineering, Electrical & Electronic

Design and test of reliable high strength ingressive polycrystalline silicon microgripper arrays

S. S. Hazra et al.

JOURNAL OF MICROMECHANICS AND MICROENGINEERING (2015)

Article Engineering, Electrical & Electronic

Fracture strength analysis of single-crystalline silicon cantilevers processed by focused ion beam

Yoshimasa Takahashi et al.

SENSORS AND ACTUATORS A-PHYSICAL (2014)

Article Engineering, Electrical & Electronic

Etching Process Effects on Surface Structure, Fracture Strength, and Reliability of Single-Crystal Silicon Theta-Like Specimens

Michael S. Gaither et al.

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2013)

Article Materials Science, Multidisciplinary

On the bending strength of single-crystal silicon theta-like specimens

Rebecca Kirkpatrick et al.

MRS COMMUNICATIONS (2013)

Article Engineering, Electrical & Electronic

Predicting Fracture in Micrometer-Scale Polycrystalline Silicon MEMS Structures

E. David Reedy et al.

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2011)

Article Materials Science, Multidisciplinary

A Sequential Tensile Method for Rapid Characterization of Extreme-value Behavior in Microfabricated Materials

B. L. Boyce

EXPERIMENTAL MECHANICS (2010)

Article Materials Science, Multidisciplinary

A comparative micro-cantilever study of the mechanical behavior of silicon based passivation films

Kurt Matoy et al.

THIN SOLID FILMS (2009)

Article Physics, Applied

Various fatigue testing of polycrystalline silicon microcantilever beam in bending

Hong Hocheng et al.

JAPANESE JOURNAL OF APPLIED PHYSICS (2008)

Article Physics, Applied

Methyl monolayers improve the fracture strength and durability of silicon nanobeams

Tuncay Alan et al.

APPLIED PHYSICS LETTERS (2006)

Article Physics, Applied

Effect of surface morphology on the fracture strength of silicon nanobeams

Tuncay Alan et al.

APPLIED PHYSICS LETTERS (2006)

Review Materials Science, Multidisciplinary

Strength and sharp contact fracture of silicon

RF Cook

JOURNAL OF MATERIALS SCIENCE (2006)

Article Materials Science, Multidisciplinary

Measuring fracture toughness of coatings using focused-ion-beam-machined microbeams

D Di Maio et al.

JOURNAL OF MATERIALS RESEARCH (2005)

Article Materials Science, Multidisciplinary

Size effect on the mechanical properties of microfabricated polysilicon thin films

JN Ding et al.

JOURNAL OF MATERIALS RESEARCH (2001)

Article Engineering, Electrical & Electronic

Evaluation of size effect on mechanical properties of single crystal silicon by nanoscale bending test using AFM

T Namazu et al.

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2000)