期刊
APPLIED PHYSICS LETTERS
卷 118, 期 15, 页码 -出版社
AMER INST PHYSICS
DOI: 10.1063/5.0042798
关键词
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资金
- Japan Society for the Promotion of Science [18K18764, 18K18907, 19H00663]
- Adaptable and Seamless Technology transfer Program from Japan Science and Technology Agency
- Casio Science Promotion Foundation
- Grants-in-Aid for Scientific Research [18K18907] Funding Source: KAKEN
The direct measurement of thrust from a magnetron sputtering source operated in argon using a pendulum thrust balance immersed in vacuum shows that the thrust imparted varies significantly with different target materials, while the ion density remains constant. The copper target demonstrates the highest thrust-to-power ratio among the materials tested, indicating thrust generation through material ejection during the sputtering process.
The direct measurement of thrust imparted by a magnetron sputtering source operated in argon is performed using a pendulum thrust balance immersed in vacuum, where various target materials are tested. The imparted thrust is clearly changed by the target material, while the ion density, which is expected to be mostly the argon ions, is unchanged. The maximum thrust-to-power ratio of 10-12mN/kW is obtained for a copper target, which has a maximum sputtering yield in the target materials tested here. It is shown that the plasma pressure force is much smaller than the detected thrust, demonstrating the thrust generation via the material ejection by the sputtering process.
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