Modeling of Poly(methylmethacrylate) Viscous Thin Films by Spin-Coating

A predictive film thickness model based on an accepted equation of state is applied to the spin-coating of sub-micron poly(methylmethacrylate) viscous thin films from toluene. Concentration effects on density and dynamic viscosity of the spin-coating solution are closely examined. The film thickness model is calibrated with a system-specific film drying rate and was observed to scale with the square root of spin speed. Process mapping is used to generate a three-dimensional design space for the control of film thickness.

Automated summary

In this study, a predictive film thickness model based on an accepted equation of state was applied to the spin-coating of sub-micron poly(methylmethacrylate) viscous thin films from toluene. The concentration effects on density and dynamic viscosity of the spin-coating solution were closely examined. Process mapping was utilized to generate a three-dimensional design space for controlling film thickness.