期刊
PHOTONICS RESEARCH
卷 9, 期 4, 页码 521-529出版社
CHINESE LASER PRESS
DOI: 10.1364/PRJ.414121
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资金
- National Natural Science Foundation of China [61505139, 61675152, 61735011]
- Natural Science Foundation of Tianjin City [16JCQNJC02000]
- National Instrumentation Program of China [2013YQ030915]
- Open Project of Key Laboratory of Opto-electronics Information Technology [2019KFKT007]
The novel all-silicon dual-cavity optical Fabry-Perot interferometer pressure sensor proposed in this study effectively addresses the pressure-temperature cross-sensitivity and temperature-related stability issues that traditional pressure sensors face in a wide temperature range. Experimental results show a significant reduction in pressure-temperature cross-sensitivity, allowing for high-precision pressure monitoring in high-temperature environments.
Pressure-temperature cross-sensitivity and its accompanying temperature-related stability is a nerve-wracking obstruction for pressure sensor performance in a wide temperature range. To solve this problem, we propose a novel (to the best of our knowledge) all-silicon dual-cavity optical Fabry -Perot interferometer (FPI) pressure sensor. The all-silicon structure has high intrinsic reflectivity and is able to eliminate the influence of thermal-expansion-mismatch-induced stress and chemical-reaction-induced gas generation, and therefore, in essence, enhances measurement accuracy. From the experiment results, the pressure-temperature cross-sensitivity is reduced to be similar to 5.96 Pa/degrees C, which presents the lowest pressure-temperature cross-sensitivity among the FPI pressure sensors with the capability of surviving high temperatures up to 700 degrees C thereby opening the way for high-precision pressure monitoring in various harsh and remote environments. (C) 2021 Chinese Laser Press.
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