期刊
MICROMACHINES
卷 12, 期 3, 页码 -出版社
MDPI
DOI: 10.3390/mi12030244
关键词
micro surface shaping; cutter-path planning; micro-optoelectromechanical system (MOEMS); microshaper; isoplane; nonsilicon-based micromachining
A simple, inexpensive method was developed to manufacture a microlens array using nonsilicon-based micromachining. The machined microlens profiles closely matched the designed ones, with only an average 1.5% error in focal lengths. The results suggest that this method is feasible for producing microlenses with moderate roughness.
A simple, easy, inexpensive, and quick nonsilicon-based micromachining method was developed to manufacture a microlens array. The spherical surface of the microlens was machined using a microshaper mounted on a three-axis vertical computer numerical control (CNC) machine with cutter-path-planning. The results show the machined profiles of microlens agree well with designed profiles. The focus ability of the machined microlens array was verified. The designed and measured focal lengths have average 1.5% error. The results revealed that the focal lengths of micro lens agreed with the designed values. A moderate roughness of microlens surface is obtained by simply polishing. The roughness of the lens surface is 43 nm in feed direction (x-direction) and 56 nm in path interval direction (y-direction). It shows the simple, scalable, and reproducible method to manufacture microlenses by microshaper with cutter-path-planning is feasible.
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