期刊
MATERIALS
卷 14, 期 5, 页码 -出版社
MDPI
DOI: 10.3390/ma14051085
关键词
MEMS; protochips fusion; in situ S; TEM; sample preparation method
类别
资金
- European Research Council (ERC) science grant TRANSDESIGN through the Horizon 2020 program [757961]
- Austrian Research Promotion Agency (FFG) [858040]
MEMS are supporting groundbreaking research in materials science and metallurgy, allowing in situ experiments on materials at the nanoscale within electron microscopes. However, electron-transparent sample preparation for MEMS e-chips remains a challenge.
Microelectromechanical systems (MEMS) are currently supporting ground-breaking basic research in materials science and metallurgy as they allow in situ experiments on materials at the nanoscale within electron microscopes in a wide variety of different conditions such as extreme materials dynamics under ultrafast heating and quenching rates as well as in complex electro-chemical environments. Electron-transparent sample preparation for MEMS e-chips remains a challenge for this technology as the existing methodologies can introduce contaminants, thus disrupting the experiments and the analysis of results. Herein we introduce a methodology for simple and fast electron-transparent sample preparation for MEMS e-chips without significant contamination. The quality of the samples as well as their performance during a MEMS e-chip experiment in situ within an electron microscope are evaluated during a heat treatment of a crossover AlMgZn(Cu) alloy.
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