期刊
VACUUM
卷 184, 期 -, 页码 -出版社
PERGAMON-ELSEVIER SCIENCE LTD
DOI: 10.1016/j.vacuum.2020.109963
关键词
Thin films; Wear and tribology; Magnetron sputtering
资金
- European Union's Horizon 2020 research and innovation program [721642: SOLUTION]
- project On-SURF [FEDER (PT2020)] [POCI-010247-FEDER-024521]
- FEDER [CEMMPRE-UID/EMS/00285/2020]
- FCT (COMPETE) [CEMMPRE-UID/EMS/00285/2020]
The research found that the friction and wear properties of W-S-C coatings are influenced by deposition pressure, with better performance at higher S/W ratios, and longer target-to-substrate distances are favorable for the industrialization of the coatings.
Self-lubricant W-S-C coatings with optimized composition possess a unique ability to provide a reduction of friction and wear in numerous operating conditions. In this study, W-S-C coatings are deposited by magnetron sputtering at different pressures, in semi-industrial conditions. The composition and tribo-mechanical properties are studied. The deposition pressure affected the carbon content of the coatings and, more importantly, the S/W ratio. Increasing the deposition pressure enhances the importance of the scattering behavior of the sputtered species. The tribological response was closely related to the S/W ratio, with better performance for higher S/W ratios. For industrialization of the W-S-C coatings, deposition at longer target-to-substrate distances is favorable.
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