期刊
SENSORS AND ACTUATORS B-CHEMICAL
卷 331, 期 -, 页码 -出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.snb.2020.129406
关键词
Carbon nanotube-metal contact; Carbon nanotube field-effect transistors; Contact resistance; Self-heating; Nanomaterials
资金
- Strategic Focus Area (SFA) Advanced Manufacturing (Project NanoAssembly)
- SNSF/FLAG-ERA CONVERGENCE [20FE-1_170224]
- Swiss National Science Foundation (SNF) [20FE-1_170224] Funding Source: Swiss National Science Foundation (SNF)
By using Ar-ion etching to remove the top layer of the electrode surface before nanotube placement, the contact resistance at the nanotube-metal interface can be significantly reduced. This results in a tenfold decrease in the median ON-resistance of transistors and a more than two orders of magnitude decrease in the interquartile range of resistance values.
Suspended carbon nanotube field-effect transistors fabricated with a dry transfer technique demonstrate strong promise as ultra-low-power, hysteresis-free gas sensors. However, the difficulty of establishing a good electrical contact between a nanotube and the electrode surface often limits the yield of low-resistance devices that can operate as low-power gas sensors. In this work, the contact resistance at the nanotube-metal interface and the distribution thereof are reduced significantly by removing the top layer of electrode surface with Ar-ion etching directly before nanotube placement. Combined with post-transfer annealing, this pre-transfer electrode surface cleaning reduces the median ON-resistance of transistors by an order of magnitude-from 1.56 MOhm to 143 kOhm-and the interquartile range by more than two orders of magnitude-from 9.38 MOhm to 59 kOhm. The ability to consistently improve nanotube-metal contact demonstrated in this work is a significant advance in the fabrication of ultraclean nanotube transistors and carbon nanotube gas sensors.
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