Testing large convex aspheres using a single wedge compensation and stitching method

Testing large convex aspheric mirrors has always been a challenging metrology problem in optics. In response to this problem, a modified method that utilizes single wedge compensation to measure large convex aspheric mirrors is proposed in this paper. The principles of this method and aberration theory are first analyzed. Two simulation examples are designed to verify the method's applicability, and the sensitivity of this configuration is also analyzed, which proves that the accuracy of the configuration can be better than 0.006 lambda (3.8 nm) with careful alignment and calibration. These examples and this analysis show that this configuration is feasible and flexible.

Automated summary

The study introduces a modified method using single wedge compensation for measuring large convex aspheric mirrors, which can achieve high accuracy with careful alignment. Two simulation examples were designed to verify the applicability of the method, demonstrating its feasibility and flexibility.