期刊
NANOTECHNOLOGY
卷 32, 期 21, 页码 -出版社
IOP PUBLISHING LTD
DOI: 10.1088/1361-6528/abe747
关键词
de-ionized water; thin film coatings; porosity; aluminum oxide; multilayer
资金
- European Research Councill (ERC AdG AMETIST) [695116]
- Academy of Finland PREIN flagship project [320165]
- European Research Council (ERC) [695116] Funding Source: European Research Council (ERC)
A new method involving treatment of the coating with heated de-ionized water after the deposition of aluminum oxide has been developed to create nanostructured aluminum oxide anti-reflection coatings with a low average reflectivity of approximately 3.3% in a broad spectrum range. This method, which is non-toxic and low-cost, is also compatible with volume manufacturing technologies used in photovoltaics such as ion beam sputtering and electron beam evaporation.
A new method for modification of planar multilayer structures to create nanostructured aluminum oxide anti-reflection coatings is reported. The method is non-toxic and low-cost, being based on treatment of the coating with heated de-ionized water after the deposition of aluminum oxide. The results show that the method provides a viable alternative for attaining a low reflectance ARC. In particular, a low average reflectivity of similar to 3.3% is demonstrated in a broadband spectrum extending from 400 nm to 2000 nm for ARCs deposited on GaInP solar-cells, the typical material used as top-junction in solar cell tandem architectures. Moreover, the process is compatible with volume manufacturing technologies used in photovoltaics, such as ion beam sputtering and electron beam evaporation.
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