相关参考文献
注意：仅列出部分参考文献，下载原文获取全部文献信息。Nanoindentation behavior of UV-curable resist and its correlation with patterning defect in nanoimprint lithography
Mingjie Li et al.
JOURNAL OF MICROMECHANICS AND MICROENGINEERING (2020)
Thermal degradation behavior of self-assembled monolayer surfactant on silicon substrate
Mingjie Li et al.
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B (2020)
Experimental investigation of inductively coupled plasma etching on cemented carbides
Yunsong Lian et al.
VACUUM (2019)
UV-curable nanoimprint resist with liquid volume-expanding monomers
Haodi Min et al.
MICROELECTRONIC ENGINEERING (2019)
Near-infrared electroluminescence from atomic layer doped Al3O3:Yb nanolaminate films on silicon
Zhongtao Ouyang et al.
SCRIPTA MATERIALIA (2018)
The role of hydrophobic silane coating on Si stamps in nanoimprint lithography
Alborz Amirsadeghi et al.
JOURNAL OF APPLIED PHYSICS (2017)
Defect analysis and lifetime evaluation of a release-coated nanoimprint mold
Masanori Okada et al.
MICROELECTRONIC ENGINEERING (2014)
Sub-100 nm ALD-assisted nanoimprint lithography for realizing vertical organic transistors with high ON/OFF ratio and high output current
Yung Hsu et al.
ORGANIC ELECTRONICS (2014)
Characterization of mechanical behavior of UV cured urethane acrylate nanocomposite films loaded with silane treated nanosilica by the aid of nanoindentation and nanoscratch experiments
Yalda Zamani Ketek Lahijania et al.
TRIBOLOGY INTERNATIONAL (2014)
A review of roll-to-roll nanoimprint lithography
Nazrin Kooy et al.
NANOSCALE RESEARCH LETTERS (2014)
Computational study of the demolding process in nanoimprint lithography
Rina Takai et al.
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B (2014)
Impact of resist shrinkage on the template release process in nanoimprint lithography
Takamitsu Tochino et al.
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B (2014)
Surface adhesion and demolding force dependence on resist composition in ultraviolet nanoimprint lithography
Alborz Amirsadeghi et al.
APPLIED SURFACE SCIENCE (2011)
Polymerization shrinkage stress measurement for a UV-curable resist in nanoimprint lithography
Alborz Amirsadeghi et al.
JOURNAL OF MICROMECHANICS AND MICROENGINEERING (2011)
Nanoimprint Lithography: A Processing Technique for Nanofabrication Advancement
Weimin Zhou et al.
NANO-MICRO LETTERS (2011)
Iridium wire grid polarizer fabricated using atomic layer deposition
Thomas Weber et al.
NANOSCALE RESEARCH LETTERS (2011)
Atomic Layer Deposition on Phase-Shift Lithography Generated Photoresist Patterns for 1D Nanochannel Fabrication
Firat Gueder et al.
ACS APPLIED MATERIALS & INTERFACES (2010)
Effects of Mold Side Wall Profile on Demolding Characteristics
Hiroaki Kawata et al.
JAPANESE JOURNAL OF APPLIED PHYSICS (2010)
Investigation of Antiadhesive Coatings for Nanoimprinting Lithography
Z. W. Zhong et al.
MATERIALS AND MANUFACTURING PROCESSES (2010)
Process-simulation system for UV-nanoimprint lithography
Mayuko Shibata et al.
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B (2010)
Adhesion force measurement between the stamp and the resin in ultraviolet nanoimprint lithography-an investigative approach
Jayakumar Perumal et al.
NANOTECHNOLOGY (2009)
Durable diamond-like carbon templates for UV nanoimprint lithography
L. Tao et al.
NANOTECHNOLOGY (2008)
Quantitative characterizations of a nanopatterned bonded wafer: force determination for nanoimprint lithography stamp removal
S. Landis et al.
NANOTECHNOLOGY (2008)
Adhesion between template materials and UV-cured nanoimprint resists
F. A. Houle et al.
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B (2007)
Antiadhesion considerations for UV nanoimprint lithography
F. A. Houle et al.
APPLIED PHYSICS LETTERS (2007)
Deposition thickness based high-throughput nano-imprint template
Muhammad Mustafa Hussain et al.
MICROELECTRONIC ENGINEERING (2007)
Nanoimprint lithography: Methods and material requirements
L. Jay Guo
ADVANCED MATERIALS (2007)
Study of the demolding process - implications for thermal stress, adhesion and friction control
Yuhua Guo et al.
JOURNAL OF MICROMECHANICS AND MICROENGINEERING (2007)
Control of micro- and nanopatterns of octadecyltrimethoxysilane monolayers using nanoimprint lithography and atmospheric chemical vapor deposition
Laurence Ressier et al.
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B (2007)
AFM characterization of anti-sticking layers used in nanoimprint
J. Tallal et al.
MICROELECTRONIC ENGINEERING (2006)
Large-scale hot embossing
M Worgull et al.
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS (2005)
Simulation and investigation of factors affecting high aspect ratio UV embossing
MB Chan-Park et al.
LANGMUIR (2005)
Fabrication of 5 nm linewidth and 14 nm pitch features by nanoimprint lithography
MD Austin et al.
APPLIED PHYSICS LETTERS (2004)
A kinetic model for step coverage by atomic layer deposition in narrow holes or trenches
RG Gordon et al.
CHEMICAL VAPOR DEPOSITION (2003)
Defect analysis in thermal nanoimprint lithography
Y Hirai et al.
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B (2003)
Optical measurements of shrinkage in UV-cured adhesives
AJ Hudson et al.
JOURNAL OF ELECTRONIC PACKAGING (2002)
Improving stamps for 10 nm level wafer scale nanoimprint lithography
M Beck et al.
MICROELECTRONIC ENGINEERING (2002)
Measurement of adhesive force between mold and photocurable resin in imprint technology
J Taniguchi et al.
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS (2002)
Study of elastic modulus and yield strength of polymer thin films using atomic force microscopy
BY Du et al.
LANGMUIR (2001)
分享论文
