期刊
JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS
卷 32, 期 6, 页码 7319-7329出版社
SPRINGER
DOI: 10.1007/s10854-021-05442-3
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类别
资金
- Wire Technology Co. LTD.
- Ministry of Science and Technology, Taiwan [MOST 108-2622-E002-009-CC2, 109A18A]
- Hsinchu Science Park R & D program of Ag Materials Technology Co., LTD.
An innovative Ag film with ultra-high twin density was proposed for improving the performance of backside metallization for power electronic devices. Experimental results indicated that nanotwinned Ag films sputtered on Si wafers with and without a Ti thin film showed improved adhesion and hardness at the Ag/Si interface, with significant differences in twin boundaries and grain boundaries.
For improving the performance of backside metallization for power electronic devices, an innovative Ag film with ultra-high twin density is proposed in this study. Experimentally, nanotwinned Ag films with thicknesses ranging from 2 to 8 mu m and a strong (111) preferred orientation were sputtered on Si (100) wafers with and without a Ti thin film. The results indicated that the coincident sigma 3 twin and sigma 9 near-twin boundaries in proportion to the total grain boundaries in this Ag nanotwinned film on Ti pre-coated Si (100) wafer were 50.8 % and 13.5 %, respectively. These Ag nanotwins had spacing of 2 to 50 nm, with an average spacing of about 12 nm, and were contained in columnar Ag grains grown normal to the Si wafer. The employment of a Ti interlayer of 0.1 mu m thickness clearly improved the adhesion at the Ag/Si interface under peeling tests, resulting in a bonding strength of 1.7 MPa and a maximal indentation hardness of 2 GPa.
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