RF discharge diagnostics: Some problems and their resolution

In this paper, we discuss a number of problems found in the literature related to experimental measurements of rf discharge electrical and plasma parameters with different electromagnetic probes. Incorrect evaluations of discharge power and the inaccurate measurement of basic plasma parameters with electrical (Langmuir), magnetic (B-dot), and microwave probes are among the troubling issues found in many recent publications on rf plasma. The purpose of this review is to show the origination of errors and ways to their mitigation based on the three-decade development of contemporary rf discharge diagnostics.

Automated summary

This paper discusses problems encountered in experimental measurements of rf discharge electrical and plasma parameters with different electromagnetic probes. Incorrect evaluations of discharge power and inaccurate measurement of basic plasma parameters have been found in recent publications on rf plasma. The purpose of the review is to demonstrate the origin of errors and suggest ways to mitigate them based on the three-decade development of contemporary rf discharge diagnostics.