期刊
IEEE SENSORS JOURNAL
卷 21, 期 4, 页码 4209-4215出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JSEN.2020.3029953
关键词
Schottky diodes; Gallium arsenide; Temperature sensors; Passivation; Ammonia; Temperature measurement; Ammonia gas; ammonium sulfide; GaAs schottky diode; sensing characteristics; surface passivation
The enhancement of gas sensing characteristics of GaAs-based Schottky diode sensors passivated by ammonium sulfide solution has been demonstrated in this work, with the response time significantly reduced upon exposure to ammonia gas. The passivated diode exhibits improved electrical characteristics and response rate, attributed to the reduction of metal-semiconductor interface states and prevention of Fermi level pinning.
In this work, enhancement of gas sensing characteristics of GaAs-based Schottky diode sensors passivated by ammonium sulfide are studied and demonstrated. The GaAs surface is passivated by saturated ammonium sulfide solution to remove its native oxide and reduction of surface state densities. The measurements indicate a significant improvement in electrical characteristics of Pt-Pd(alloy)/GaAs diode where the Schottky barrier height increases from 0.688 to 0.758eV after surface passivation. The Schottky diode with passivated GaAs surface exhibits a response of 63% upon exposure to 600ppm ammonia gas at a working temperature of 150 degrees C, which is about 2.5 times higher than that of the non-passivated sensor. This noteworthy improvement is attributed to the decrement of metal-semiconductor interface states, preventing the Fermi level pinning. Furthermore, the response (recovery) times of 29 (138)s is obtained upon exposure to 600ppm ammonia at 150 degrees C, showing a value of around 2 times lower than that for the non-passivated sensor.
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