相关参考文献
注意：仅列出部分参考文献，下载原文获取全部文献信息。A high-sensitivity MEMS gravimeter with a large dynamic range
Shihao Tang et al.
MICROSYSTEMS & NANOENGINEERING (2019)
A 0.23-μg Bias Instability and 1-μg/√Hz Acceleration Noise Density Silicon Oscillating Accelerometer With Embedded Frequency-to-Digital Converter in PLL
Jian Zhao et al.
IEEE JOURNAL OF SOLID-STATE CIRCUITS (2017)
Design and test of a micromachined resonant accelerometer with high scale factor and low noise
Yonggang Yin et al.
SENSORS AND ACTUATORS A-PHYSICAL (2017)
A MEMS piezoelectric in-plane resonant accelerometer based on aluminum nitride with two-stage microleverage mechanism
Yixiang Wang et al.
SENSORS AND ACTUATORS A-PHYSICAL (2017)
A MEMS resonant accelerometer with sensitivity enhancement and adjustment mechanisms
Hong Ding et al.
JOURNAL OF MICROMECHANICS AND MICROENGINEERING (2017)
Measurement of the Earth tides with a MEMS gravimeter
R. P. Middlemiss et al.
NATURE (2016)
A Sub-μg Bias-Instability MEMS Oscillating Accelerometer With an Ultra-Low-Noise Read-Out Circuit in CMOS
Yang Zhao et al.
IEEE JOURNAL OF SOLID-STATE CIRCUITS (2015)
Microelectromechanical Resonant Accelerometer Designed with a High Sensitivity
Jing Zhang et al.
SENSORS (2015)
A high-resolution micro-electro-mechanical resonant tilt sensor
Xudong Zou et al.
SENSORS AND ACTUATORS A-PHYSICAL (2014)
A Resonant Microaccelerometer With High Sensitivity Operating in an Oscillating Circuit
Claudia Comi et al.
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2010)
In-plane MEMS-based nano-g accelerometer with sub-wavelength optical resonant sensor
U. Krishnamoorthy et al.
SENSORS AND ACTUATORS A-PHYSICAL (2008)
A resonant accelerometer with two-stage microleverage mechanisms fabricated by SOI-MEMS technology
SXP Su et al.
IEEE SENSORS JOURNAL (2005)
A vacuum packaged surface micromachined resonant accelerometer
AA Seshia et al.
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2002)
Two-stage compliant microleverage mechanism optimization in a resonant accelerometer
XPS Su et al.
STRUCTURAL AND MULTIDISCIPLINARY OPTIMIZATION (2001)
Single-stage microleverage mechanism optimization in a resonant accelerometer
XPS Su et al.
STRUCTURAL AND MULTIDISCIPLINARY OPTIMIZATION (2001)
分享论文
