期刊
BIOSENSORS & BIOELECTRONICS
卷 174, 期 -, 页码 -出版社
ELSEVIER ADVANCED TECHNOLOGY
DOI: 10.1016/j.bios.2020.112829
关键词
Low noise; Low capacitance; Signal-to-noise ratio; Sapphire etching; Scalable membrane fabrication; DNA sensing
类别
资金
- Arizona State University (ASU)
- National Science Foundation [1711412, 1809997, 1838443, 1847324, 2020464, 2027215]
- NSF [ECCS-1542160]
- Direct For Mathematical & Physical Scien
- Division Of Materials Research [1838443] Funding Source: National Science Foundation
- Directorate For Engineering
- Div Of Electrical, Commun & Cyber Sys [2020464, 1809997] Funding Source: National Science Foundation
- Directorate For Engineering
- Div Of Electrical, Commun & Cyber Sys [1711412] Funding Source: National Science Foundation
- Division of Computing and Communication Foundations
- Direct For Computer & Info Scie & Enginr [2027215] Funding Source: National Science Foundation
- Div Of Chem, Bioeng, Env, & Transp Sys
- Directorate For Engineering [1847324] Funding Source: National Science Foundation
Solid-state nanopores have various applications in single-molecule biosensing and sequencing, but high capacitive noise from conventional silicon substrates limits their performance. A new approach using insulating sapphire wafers for nanopore membranes is proposed, demonstrating scalable formation of small membranes with low noise sensing capabilities.
Solid-state nanopores have broad applications from single-molecule biosensing to diagnostics and sequencing. The high capacitive noise from conventionally used conductive silicon substrates, however, has seriously limited both their sensing accuracy and recording speed. A new approach is proposed here for forming nanopore membranes on insulating sapphire wafers to promote low-noise nanopore sensing. Anisotmpic wet etching of sapphire through micro-patterned triangular masks is used to demonstrate the feasibility of scalable formation of small (<25 mu m) membranes with a size deviation of less than 7 mu m over two 2-inch wafers. For validation, a sapphire-supported (SaS) nanopore chip with a 100 times larger membrane area than conventional nanopores was tested, which showed 130 times smaller capacitance (10 pF) and 2.6 times smaller root-mean-square (RMS) noise current (18-21 pA over 100 kHz bandwidth, with 50-150 mV bias) when compared to a silicon-supported (SiS) nanopore (similar to 1.3 nF, and 46-51 pA RMS noise). Tested with 1k base-pair double-stranded DNA, the SaS nanopore enabled sensing at microsecond speed with a signal-to-noise ratio of 21, compared to 11 from a SiS nanopore. This SaS nanopore presents a manufacturable nanoelectmnic platform feasible for high-speed and low-noise sensing of a variety of biomolecules.
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