期刊
ADVANCED MATERIALS
卷 33, 期 15, 页码 -出版社
WILEY-V C H VERLAG GMBH
DOI: 10.1002/adma.202006601
关键词
atomic‐ sawtooth surface; chemical vapor deposition; epitaxial growth; single‐ crystal; transition metal dichalcogenides
类别
资金
- Samsung Research Funding & Incubation Center of Samsung Electronics [SRFC-MA1901-04]
- Basic Science Research Program through the National Research Foundation of Korea (NRF) - Ministry of Science, ICT & Future Planning [2018R1A2B2002302, 2020R1A4A3079710, 2020R1A2B5B03002054]
- Creative Materials Discovery Program through the National Research Foundation of Korea (NRF) [2015M3D1A1070672]
- Institute for Basic Science [IBS-R011-D1]
- Ministry of Science & ICT (MSIT), Republic of Korea [IBS-R011-D1-2021-A00] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)
- National Research Foundation of Korea [5199990414462] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)
This study presents a method for growing transition metal dichalcogenide single-crystal monolayers on a centimeter scale using a gold surface as a growth template, providing a new avenue for growing diatomic van der Waals heterostructures on a wafer scale.
Growth of 2D van der Waals layered single-crystal (SC) films is highly desired not only to manifest the intrinsic physical and chemical properties of materials, but also to enable the development of unprecedented devices for industrial applications. While wafer-scale SC hexagonal boron nitride film has been successfully grown, an ideal growth platform for diatomic transition metal dichalcogenide (TMdC) films has not been established to date. Here, the SC growth of TMdC monolayers on a centimeter scale via the atomic sawtooth gold surface as a universal growth template is reported. The atomic tooth-gullet surface is constructed by the one-step solidification of liquid gold, evidenced by transmission electron microscopy. The anisotropic adsorption energy of the TMdC cluster, confirmed by density-functional calculations, prevails at the periodic atomic-step edge to yield unidirectional epitaxial growth of triangular TMdC grains, eventually forming the SC film, regardless of the Miller indices. Growth using the atomic sawtooth gold surface as a universal growth template is demonstrated for several TMdC monolayer films, including WS2, WSe2, MoS2, the MoSe2/WSe2 heterostructure, and W1-xMoxS2 alloys. This strategy provides a general avenue for the SC growth of diatomic van der Waals heterostructures on a wafer scale, to further facilitate the applications of TMdCs in post-silicon technology.
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