期刊
APPLIED MATERIALS TODAY
卷 21, 期 -, 页码 -出版社
ELSEVIER
DOI: 10.1016/j.apmt.2020.100879
关键词
CVD graphene; Transfer; Sublimation; Anthracene; Microphone
资金
- national funds through the FCT/MEC [Ultragraf-M-ERA-NET2/0003/2016, i3N, UIDB/50 025/2020, UIDP/50025/2020]
- FCT, through IDMEC, under LAETA [UIDB/50022/2020]
- Fundacao Calouste Gulbenkian
In this work, suspended 4-mm-wide graphene membranes are obtained through a sublimation-assisted transfer process, using few-layer films grown by microwave plasma chemical vapor deposition. This result is achieved by a new approach involving the removal of the graphene-transfer supporting layer in vacuum. The membranes produced by this procedure show the largest area-to-thickness ratio described in the literature with a 2-fold improvement when compared to the best results using the conventional PMMA-assisted transfer, and a five orders of magnitude increase when compared to previous sublimation assisted processes. This breakthrough allows the implementation of a wide variety of technological applications where 2D materials with atomic thickness and large areas are required. As large-area freestanding membranes are difficult to obtain, a new figure of merit is defined to benchmark the various methods of suspending graphene. A high transfer yield is achieved, and the mechanical and optical properties of the 3.7 nm thick membranes are evaluated. Finally, a prototype condenser microphone is built and tested, and found to exhibit an enhanced specific response. (C) 2020 Elsevier Ltd. All rights reserved.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据