4.7 Article

Soft-Chemistry-Assisted On-Chip Integration of Nanostructured α-Quartz Microelectromechanical System

期刊

ADVANCED MATERIALS TECHNOLOGIES
卷 6, 期 3, 页码 -

出版社

WILEY
DOI: 10.1002/admt.202000831

关键词

cantilevers; MEMS; nanostructuration; piezoelectricity; quartz; silicon; thin films

资金

  1. European Research Council (ERC) under the European Union's Horizon 2020 research and innovation programme (project SENSiSOFT) [803004]
  2. ATIP-Avenir program
  3. Institut des Materiaux de Paris Centre [IMPC FR2482]
  4. Sorbonne Universite, CNRS
  5. C'Nano projects of the Region Ile-de-France
  6. Spanish Ministerio de Ciencia e Innovacion through the severo Ochoa program [CEX2019-000917-S]
  7. European Research Council (ERC) [803004] Funding Source: European Research Council (ERC)

向作者/读者索取更多资源

By combining chemical solution deposition, soft-nanoimprint lithography, and top-down microfabrication processes, the researchers successfully developed nanostructured epitaxial piezoelectric alpha-quartz MEMS on silicon. This system demonstrates high force and mass sensitivity while maintaining mechanical quality factor, proving the feasibility of low-cost production.
The development of advanced piezoelectric alpha-quartz microelectromechanical system (MEMS) for sensing and precise frequency control applications requires the nanostructuration and on-chip integration of this material on silicon material. However, the current quartz manufacturing methods are based on bonding bulk micromachined crystals on silicon, which limits the size, the performance, the integration cost, and the scalability of quartz microdevices. Here, chemical solution deposition, soft-nanoimprint lithography, and top-down microfabrication processes are combined to develop the first nanostructured epitaxial (100)alpha-quartz/(100)Si piezoelectric cantilevers. The coherent Si/quartz interface and film thinness combined with a controlled nanostructuration on silicon-insulator-silicon technology substrates provide high force and mass sensitivity while preserving the mechanical quality factor of the microelectromechanical systems. This work proves that biocompatible nanostructured epitaxial piezoelectric alpha-quartz-based MEMS on silicon can be engineered at low cost by combining soft-chemistry and top-down lithographic techniques.

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