期刊
NATIONAL SCIENCE REVIEW
卷 8, 期 12, 页码 -出版社
OXFORD UNIV PRESS
DOI: 10.1093/nsr/nwaa298
关键词
graphene nanoribbons; template-free chemical vapor deposition; comb-like etching; self-alignment; in situ growth
资金
- Strategic Priority Research Program of the Chinese Academy of Sciences [XDB 30000000]
- National Natural Science Foundation of China [22021002, 61390502]
- Beijing National Laboratory for Molecular Sciences [BNLMS-CXXM-202101]
Intrinsic graphene is limited in electronic applications due to its semi-metallic characteristics, while graphene nanoribbons (GNRs) are considered promising semiconductors with bandgap-opening features. This study reports a template-free CVD strategy for growing large-area, high-quality, self-aligned GNR arrays on liquid copper, offering operational simplicity and efficiency for potential use in integrated circuits.
Intrinsic graphene features semi-metallic characteristics that limit its applications in electronic devices, whereas graphene nanoribbons (GNRs) are promising semiconductors because of their bandgap-opening feature. However, the controllable mass-fabrication of high-quality GNR arrays remains a major challenge. In particular, the in situ growth of GNR arrays through template-free chemical vapor deposition (CVD) has not been realized. Herein, we report a template-free CVD strategy to grow large-area, high-quality and self-aligned GNR arrays on liquid copper surface. The width of as-grown GNR could be optimized to sub-10 nm with aspect ratio up to 387, which is higher than those of reported CVD-GNRs. The study of the growth mechanism indicates that a unique comb-like etching-regulated growth process caused by a trace hydrogen flow guides the formation of the mass-produced self-aligned GNR arrays. Our approach is operationally simple and efficient, offering an assurance for the use of GNR arrays in integrated circuits.
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