相关参考文献
注意：仅列出部分参考文献，下载原文获取全部文献信息。High temperature annealing effects on spectral, microstructural and laser damage resistance properties of sputtered HfO2 and HfO2-SiO2 mixture-based UV mirrors
Giedrius Abromavicius et al.
OPTICAL MATERIALS (2019)
Growth properties and optical properties for HfO2 thin films deposited by atomic layer deposition
Yaowei Wei et al.
JOURNAL OF ALLOYS AND COMPOUNDS (2018)
Effect of heat treatment on properties of HfO2 film deposited by ion-beam sputtering
Huasong Liu et al.
OPTICAL MATERIALS (2017)
Investigation of the Ageing Effects Exhibited by AR Coatings Exposed to ultraviolet laser Irradiation
Roelene Botha et al.
LASER-INDUCED DAMAGE IN OPTICAL MATERIALS 2016 (2016)
Postdeposition treatment of IBS coatings for UV applications with optimized thin-film stress properties
Martin Bischoff et al.
APPLIED OPTICS (2014)
Reliability assessment of ultra-thin HfO2 films deposited on silicon wafer
Wei-En Fu et al.
APPLIED SURFACE SCIENCE (2012)
Development of hafnium based high-k materials-A review
J. H. Choi et al.
MATERIALS SCIENCE & ENGINEERING R-REPORTS (2011)
Atomic layer deposition of HfO2: Effect of structure development on growth rate, morphology and optical properties of thin films
Raul Rammula et al.
APPLIED SURFACE SCIENCE (2010)
What is the Young's Modulus of Silicon?
Matthew A. Hopcroft et al.
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2010)
Structure and optical properties of HfO2 thin films on silicon after rapid thermal annealing
Tingting Tan et al.
OPTICAL MATERIALS (2010)
A structure zone diagram including plasma-based deposition and ion etching
Andre Anders
THIN SOLID FILMS (2010)
The correlation between mechanical stress, thermal shift and refractive index in HfO2, Nb2O5, Ta2O5 and SiO2 layers and its relation to the layer porosity
O. Stenzel et al.
THIN SOLID FILMS (2009)
Effect of assist ion beam voltage on intrinsic stress and optical properties of Ta2O5 thin films deposited by dual ion beam sputtering
S. G. Yoon et al.
THIN SOLID FILMS (2008)
Effects of annealing on laser-induced damage threshold of TiO2/SiO2 high reflectors
Jianke Yao et al.
APPLIED SURFACE SCIENCE (2007)
A comprehensive model of stress generation and relief processes in thin films deposited with energetic ions
MMM Bilek et al.
SURFACE & COATINGS TECHNOLOGY (2006)
分享论文
