期刊
MICROMACHINES
卷 12, 期 1, 页码 -出版社
MDPI
DOI: 10.3390/mi12010040
关键词
micro-electro-mechanical systems (MEMS) test; built-in-self-test (BIST); failure modes; multi-functional sensors
类别
资金
- Engineering and Physical Sciences Research Council under the Centre for Doctoral Training in Embedded intelligence (CDT-EI) [1799140]
A novel taxonomy of built-in self-test (BIST) methods for testing micro-electro-mechanical systems (MEMS) is presented in this study. With MEMS testing accounting for 50% of total costs, cost-effective and non-intrusive BIST solutions are actively sought after. A classification table benchmarks different testing methods based on ease of implementation, usefulness, test duration, and power consumption, providing insights into their domain of application.
A novel taxonomy of built-in self-test (BIST) methods is presented for the testing of micro-electro-mechanical systems (MEMS). With MEMS testing representing 50% of the total costs of the end product, BIST solutions that are cost-effective, non-intrusive and able to operate non-intrusively during system operation are being actively sought after. After an extensive review of the various testing methods, a classification table is provided that benchmarks such methods according to four performance metrics: ease of implementation, usefulness, test duration and power consumption. The performance table provides also the domain of application of the method that includes field test, power-on test or assembly phase test. Although BIST methods are application dependent, the use of the inherent multi-modal sensing capability of most sensors offers interesting prospects for effective BIST, as well as built-in self-repair (BISR).
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