期刊
MICROMACHINES
卷 12, 期 1, 页码 -出版社
MDPI
DOI: 10.3390/mi12010006
关键词
focused ion beam milling; focused ion beam induced deposition; 3D nanostructuring; chirality; chiral photonics; circular polarization; chiroptical effects
类别
资金
- MIUR-Italian Ministry of Research in the FISR-CIPE National Project INNOSENSE-Development of an innovative sensing platform for on-field analysis and monitoring (delibera CIPE) [78]
- project Tecnopolo di Nanotecnologia e Fotonica per la medicina di precisione (TECNOMED)-FISR/MIUR-CNR: delibera CIPE [3449 del 7-08-2017 CUP: B83B17000010001]
The focused ion beam (FIB) technology plays a crucial role in the advancement of micro- and nano-systems in various research areas. Its applications have expanded to the field of photonics, enabling the development of systems with complex shapes and precise geometrical features. This technology has the potential to create novel nanophotonic devices for a wide range of applications, from polarization control to subwavelength imaging.
The focused ion beam (FIB) is a powerful piece of technology which has enabled scientific and technological advances in the realization and study of micro- and nano-systems in many research areas, such as nanotechnology, material science, and the microelectronic industry. Recently, its applications have been extended to the photonics field, owing to the possibility of developing systems with complex shapes, including 3D chiral shapes. Indeed, micro-/nano-structured elements with precise geometrical features at the nanoscale can be realized by FIB processing, with sizes that can be tailored in order to tune optical responses over a broad spectral region. In this review, we give an overview of recent efforts in this field which have involved FIB processing as a nanofabrication tool for photonics applications. In particular, we focus on FIB-induced deposition and FIB milling, employed to build 3D nanostructures and metasurfaces exhibiting intrinsic chirality. We describe the fabrication strategies present in the literature and the chiro-optical behavior of the developed structures. The achieved results pave the way for the creation of novel and advanced nanophotonic devices for many fields of application, ranging from polarization control to integration in photonic circuits to subwavelength imaging.
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