期刊
MICROMACHINES
卷 11, 期 12, 页码 -出版社
MDPI
DOI: 10.3390/mi11121068
关键词
optical MEMS; microlens array; multiple focal lengths; three-dimensional imaging
类别
资金
- National Research Foundation of Korea (NRF) - Korean government [NRF-2018R1A4A1025623, NRF-2020R1A2C2004983]
- Korean Institute of Energy Technology Evaluation and Planning (KETEP)
- Ministry of Trade, Industry & Energy (MOTIE) of the Republic of Korea [20183010014310]
- GIST Research Institute (GRI) - GIST
- Institute of Information & Communications Technology Planning & Evaluation (IITP) - Korean government (MSIT) [2020-0-01000]
- Samsung Electronics
- Ministry of Science & ICT (MSIT), Republic of Korea [GIST-09-16] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)
Imaging applications based on microlens arrays (MLAs) have a great potential for the depth sensor, wide field-of-view camera and the reconstructed hologram. However, the narrow depth-of-field remains the challenge for accurate, reliable depth estimation. Multifocal microlens array (Mf-MLAs) is perceived as a major breakthrough, but existing fabrication methods are still hindered by the expensive, low-throughput, and dissimilar numerical aperture (NA) of individual lenses due to the multiple steps in the photolithography process. This paper reports the fabrication method of high NA, Mf-MLAs for the extended depth-of-field using single-step photolithography assisted by chemical wet etching. The various lens parameters of Mf-MLAs are manipulated by the multi-sized hole photomask and the wet etch time. Theoretical and experimental results show that the Mf-MLAs have three types of lens with different focal lengths, while maintaining the uniform and high NA irrespective of the lens type. Additionally, we demonstrate the multi-focal plane image acquisition via Mf-MLAs integrated into a microscope.
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