4.7 Article

Thin-film synthesis of superconductor-on-insulator A15 vanadium silicide

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SCIENTIFIC REPORTS
卷 11, 期 1, 页码 -

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NATURE RESEARCH
DOI: 10.1038/s41598-021-82046-1

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  1. U.S. DOE Office of Science User Facility, at Brookhaven National Laboratory [DE-SC0012704]
  2. US Department of Energy, Basic Energy Sciences, Materials Sciences and Engineering Division
  3. BNL Laboratory Research and Development Project [19-008]

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We present a new method for thin-film synthesis of the superconducting A15 phase of vanadium silicide with critical temperature higher than 13 K. Measurement of the synthesized thin films confirms the stoichiometry and structure, and the superconducting properties of the material have been demonstrated, making it a promising candidate for silicon-compatible quantum devices and circuits.
We present a new method for thin-film synthesis of the superconducting A15 phase of vanadium silicide with critical temperature higher than 13 K. Interdiffusion between a metallic vanadium film and the underlying silicon device layer in a silicon-on-insulator substrate, at temperatures between 650 and 750 degrees C, favors formation of the vanadium-rich A15 phase by limiting the supply of available silicon for the reaction. Energy dispersive X-ray spectroscopy, X-ray photoelectron spectroscopy, and X-ray diffraction verify the stoichiometry and structure of the synthesized thin films. We measure superconducting critical currents of more than 10(6) amperes per square centimeter at low temperature in micron-scale bars fabricated from the material, and an upper critical magnetic field of 20 T, from which we deduce a superconducting coherence length of 4 nm, consistent with previously reported bulk values. The relatively high critical temperature of A15 vanadium silicide is an appealing property for use in silicon-compatible quantum devices and circuits.

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