4.3 Article

Characteristic analysis of a capacitive pressure-sensitive structure with linkage film

期刊

JOURNAL OF COMPUTATIONAL ELECTRONICS
卷 20, 期 1, 页码 658-667

出版社

SPRINGER
DOI: 10.1007/s10825-020-01642-y

关键词

Pressure sensor; Linkage film; Capacitor mode; Touch mode; Linear response

资金

  1. National Natural Science Foundation of China [61372019]
  2. Natural Science Foundation of Liaoning Province [20180550950]

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This paper introduces a novel capacitive pressure-sensitive structure with a linkage film to expand the linear response range and improve linearity. Simulation results show that the proposed structure significantly outperforms the traditional touch mode capacitive pressure-sensitive structure in terms of linear response range and nonlinearity.
In this paper, a capacitive pressure-sensitive structure with linkage film is proposed to expand the linear response range and linearity of the touch mode capacitive pressure-sensitive structure. In its construct, the top and bottom electrode plates are both sensitive to pressure and movable, thereby adjusting the way of contact and improving the performance. Through the simulation with the finite-elements method, characteristics of the capacitive pressure-sensitive structure with linkage film are analyzed. Results indicate that when compared to the touch mode capacitive pressure-sensitive structure, the linear response range of the proposal is more than doubled, and its nonlinearity can be significantly decreased.

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