期刊
VACUUM
卷 182, 期 -, 页码 -出版社
PERGAMON-ELSEVIER SCIENCE LTD
DOI: 10.1016/j.vacuum.2020.109687
关键词
Nonpolar; LaAlO3; Low-temperature growth
资金
- Key-Area Research and Development Program of Guangdong Province [2019B010145001, 2019B010128002, 2019B010127001, 2019B010129001]
- National Key Research and Development Project [2018YFB1801900, 2018YFB1801902]
- Guangzhou Basic and Applied Basic Research Project [202002030005]
- Xiangjiang Scholar Program [XJ2019060]
- Fundamental Research Funds for the Central Universities [D2191590, D2190530]
Nonpolar GaN demonstrates a significant potential for application in the field of light-emitting diodes, polarization sensitive detectors, etc. However, the achievement of the high-quality nonpolar GaN epitaxial films still faces significant challenges. In this study, the high-quality nonpolar a-plane GaN epitaxial films have been obtained on the lattice-matched LaAlO3(100) substrates through the low-temperature pulsed laser deposition. The similar to 500 nm-thick nonpolar a-plane epitaxial films grown at 450 degrees C exhibit small full-width at half-maximum (FWHM) of 0.15 degrees and 0.20 degrees for GaN(11-20) and GaN(10-11) for the X-ray rocking curves, respectively, and very smooth surface with a root-mean-square roughness of 1.2 nm. In addition, sharp and abrupt GaN/LaAlO3 hetem-interfaces are observed. The developed GaN epitaxial films present strong potential of application in the field of UV detection and curing in the near future.
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