期刊
ULTRAMICROSCOPY
卷 227, 期 -, 页码 -出版社
ELSEVIER
DOI: 10.1016/j.ultramic.2020.113200
关键词
Scanning Electron Microscopy; Topography reconstruction; Back Scatter Electron; Principal Component Analysis
类别
资金
- LabeX LaSIPS, France [ANR-10-LABX-0040-LaSIPS, ANR-11-IDEX-0003-02, ANR-10-EQPX-37]
This article discusses a novel approach to reconstruct topography using BSE images from multiple detectors, which is efficient and independent of detector number or orientation. The method is based on a modal decomposition of the principal image components and requires minimal calibration.
Scanning Electron Microscopes (SEMs) often generate images with a shaded appearance which gives a natural 3D impression. Ergo, quite a few methods to reconstruct the 3D surface topography from these using shape-from-shading methods are available in the literature. Here, a novel approach is discussed which uses BackScatter Electron (BSE) images from multiple detectors to reconstruct the topography. Classically, algorithms exist which resort to a quad-BSE detector setup. However, other detector configurations are often found in SEMs. A set of images of these non-conforming detectors still contains enough information to allow for reconstruction, but requires a more general algorithm to do so. This article discusses a method based on a modal decomposition of the principal image components. The resulting method is shown to be efficient and independent of the number of detectors or their orientation. In fact, the orientation is identified as part of the algorithm and thus requires very little calibration.
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