期刊
SURFACE & COATINGS TECHNOLOGY
卷 405, 期 -, 页码 -出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.surfcoat.2020.126556
关键词
Magnetron sputtering; Titanium boride; Microstructure; Mechanical properties; Wear
This study investigates the chemical, structural, mechanical, and tribological properties of TiBx coatings produced by PVD techniques. The DC-MS coatings were overstochiometric, while HiPIMS coatings showed a nearly 2 atomic ratio. Both types of coatings were composed of a crystalline TiB2 phase, but HiPIMS exhibited a dominant (001) texture.
This study deals with a deep investigation on chemical, structural, mechanical and tribological properties of TiBx coatings produced by means of PVD techniques, i.e. Direct Current (DC-MS) and High Power Impulse Magnetron Sputtering (HiPIMS). TiBx coatings were deposited onto Si wafer, at different substrate temperatures (200, 300 and 400 degrees C). DC-MS products were strongly overstoichiometric (B at.%/Ti at.% up to 2.86 +/- 0.01 at 200 degrees C), while HiPIMS ones showed a B/Ti atomic ratio closed to 2, particularly at high temperature. Moreover, HiPIMS films exhibited a dense and almost featureless morphology. All the deposited films were constituted of one crystalline TiB2 phase with hexagonal structure, but in HiPIMS mode, a completely dominant (001) texture was developed, which could be responsible of superior mechanical properties and low wear rates, compared to DC-MS products. Different wear mechanisms, i.e. micro-peeling vs direct ploughing at low abrasion rate have been speculated for the two coating types.
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