期刊
SURFACE & COATINGS TECHNOLOGY
卷 403, 期 -, 页码 -出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.surfcoat.2020.126412
关键词
Microstructure; Hardness; Toughness; Wear resistance; Ta-Hf-N film
资金
- Natural Science Foundation of China [51101087]
- China Postdoctoral Science Foundation [2013M540450, 2014T70520]
- Postgraduate Research & Practice Innovation Program of Jiangsu Province [KYCX20_0277]
- Fundamental Research Project of Guizhou Science and Technology Department [QKHJC [2019]1085, [2020]1Y230]
- Science and Technology Planning Project of Guizhou [QKHPTRC [2018]5781-16]
- Talent Introduction Research Project of Guizhou University [GURJHZ [2017]01]
The hardness and toughness of HfN films alloying with Ta element is crucial for their wear resistance when they are applied in the harsh environment. In this study, TaxHf1-xN (x= 0-1) thin films with various Ta contents were deposited on silicon wafer and TC4 alloy substrates by DC reactive magnetron sputtering, respectively. The relationship between structure, mechanical and tribological properties of TaxHf1-xN films was investigated. TaxHf1-xN films are presented as the solid solutions with B1-NaCl rock salt structure. As the content of tantalum increases, the grain size and residual compressive stress of TaxHf1-xN films increases firstly then decreases, while the preferred orientation transfers from (111) to (200) and then back to (111). The hardness and H/E increases initially and then decreases with the Ta contents, which is also consistent with the fracture toughness. When x is 0.58, TaxHf1-xN film shows the maximum hardness value (44 GPa), H/E (0.15), H-3/E-2 (1.02 GPa), fracture toughness (3.48 MPa.m(1/2)) and lower wear rate (5.6x10(-6)mm(3)/Nm). It is found that the wear resistance of TaxHf1-xN films is directly related to the H/E and fracture toughness.
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