期刊
SCRIPTA MATERIALIA
卷 191, 期 -, 页码 120-125出版社
PERGAMON-ELSEVIER SCIENCE LTD
DOI: 10.1016/j.scriptamat.2020.09.026
关键词
Thin films; Transition-metal (TM) diborides; Age hardening; Thermal stability; Hardness and elastic modulus
类别
资金
- Knut and Alice Wallenberg (KAW) foundation [KAW 2015.0043]
- Swedish Research Council VR [2014-5790, 2018-03957, 642-2013-8020]
- VINNOVA [2019-04882]
- Carl Tryggers Stiftelse [CTS 15:219, CTS 17:166, CTS 14:431]
- Swedish Government Strategic Research Area in Materials Science on Functional Materials at Linkoping University (Faculty Grant SFO Mat LiU) [2009 00971]
- Swedish research council VR-RFI [2017-00646_9]
- Swedish Foundation for Strategic Research [RIF14-0053, RIF14-0074]
- Swedish Foundation for Strategic Research (SSF) [RIF14-0074] Funding Source: Swedish Foundation for Strategic Research (SSF)
The mechanical properties of Zr1-xTaxBy thin films were studied, showing an increase in hardness during annealing with the highest achieved for Zr0.8Ta0.2B1.8. Despite a decrease in hardness due to factors like recrystallization, all films maintained hardness values above 34 GPa throughout the annealing temperature range.
We recently showed that sputter-deposited Zr1-xTaxBy thin films have hexagonal AlB2-type columnar nanostructure in which column boundaries are B-rich for x < 0.2, while Ta-rich for x >= 0.2. As-deposited layers with x >= 0.2 exhibit higher hardness and, simultaneously, enhanced toughness. Here, we study the mechanical properties of ZrB2.4, Zr0.8Ta0.2B1.8, and Zr0.7Ta0.3B1.5 films annealed in Ar atmosphere as a function of annealing temperature T-a up to 1200 degrees C. In-situ and ex-situ nanoindentation analyses reveal that all films undergo age hardening up to T-a = 800 degrees C, with the highest hardness achieved for Zr0.8Ta0.2B1.8 (45.5 +/- 1.0 GPa). The age hardening, which occurs without any phase separation or decomposition, can be explained by point-defect recovery that enhances chemical bond density. Although hardness decreases at T-a > 800 degrees C due mainly to recrystallization, column coarsening, and planar defect annihilation, all layers show hardness values above 34 GPa over the entire T-a range. (C) 2020 Acta Materialia Inc. Published by Elsevier Ltd.
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