4.7 Article

Nonlinear electric field dependence of the transverse piezoelectric response in a (001) ferroelectric film

期刊

SCRIPTA MATERIALIA
卷 189, 期 -, 页码 84-88

出版社

PERGAMON-ELSEVIER SCIENCE LTD
DOI: 10.1016/j.scriptamat.2020.08.006

关键词

Piezoelectricity; Ferroelectric materials; Thin films; Transverse piezoelectric coefficient (e(31,f)); Microelectromechanical systems (MEMS)

资金

  1. National Natural Science Foundation of China (NSFC) [51772175, 51775319]
  2. seed funding for top talents in Qilu University of Technology (Shandong Academy of Sciences)
  3. international cooperation research project of Qilu University of Technology [QLUTGJHZ2018003]
  4. Nano Projects of Suzhou City [ZXG201445]
  5. Science and Technology Projects of Suzhou City [SYG201718]
  6. Independent Innovation Foundation of Shandong University [2018JC045, 2017ZD008]

向作者/读者索取更多资源

A non-linearly decreasing piezoelectric coefficient with an external electric field is an intrinsic property of a fully poled ferroelectric film, which has been observed in the measured longitudinal piezoelectric responses. However, for transverse piezoelectric responses, the observed converse piezoelectric coefficients (e(31),(f)) have displayed a different trend. Here we show that this disagreement can be rationally resolved by utilizing a small field e(3)(1,)(f) test under a sweeping direct current bias voltage, in which the field-dependent transverse piezoelectric response of a (001)-film is analyzed in a stepwise manner. Understanding of this nonlinear field-dependence will help improve the design of transverse piezoelectric devices. (C) 2020 Acta Materialia Inc. Published by Elsevier Ltd. All rights reserved.

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