期刊
SCRIPTA MATERIALIA
卷 189, 期 -, 页码 84-88出版社
PERGAMON-ELSEVIER SCIENCE LTD
DOI: 10.1016/j.scriptamat.2020.08.006
关键词
Piezoelectricity; Ferroelectric materials; Thin films; Transverse piezoelectric coefficient (e(31,f)); Microelectromechanical systems (MEMS)
类别
资金
- National Natural Science Foundation of China (NSFC) [51772175, 51775319]
- seed funding for top talents in Qilu University of Technology (Shandong Academy of Sciences)
- international cooperation research project of Qilu University of Technology [QLUTGJHZ2018003]
- Nano Projects of Suzhou City [ZXG201445]
- Science and Technology Projects of Suzhou City [SYG201718]
- Independent Innovation Foundation of Shandong University [2018JC045, 2017ZD008]
A non-linearly decreasing piezoelectric coefficient with an external electric field is an intrinsic property of a fully poled ferroelectric film, which has been observed in the measured longitudinal piezoelectric responses. However, for transverse piezoelectric responses, the observed converse piezoelectric coefficients (e(31),(f)) have displayed a different trend. Here we show that this disagreement can be rationally resolved by utilizing a small field e(3)(1,)(f) test under a sweeping direct current bias voltage, in which the field-dependent transverse piezoelectric response of a (001)-film is analyzed in a stepwise manner. Understanding of this nonlinear field-dependence will help improve the design of transverse piezoelectric devices. (C) 2020 Acta Materialia Inc. Published by Elsevier Ltd. All rights reserved.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据