期刊
SCIENCE CHINA-INFORMATION SCIENCES
卷 64, 期 4, 页码 -出版社
SCIENCE PRESS
DOI: 10.1007/s11432-020-2974-9
关键词
MEMS; mode-localised sensors; resolution limit; 2-degree-of-freedom; higher degree-of-freedom
资金
- National Key Research and Development Program of China [2018YFB2002600]
- National Natural Science Foundation of China [51575454]
- Fundamental Research Funds for the Central Universities [3102019JC002]
This paper discusses the resolution limits of mode-localised sensors and the possibility of resolution improvement through mode-localised sensing, concluding that more weakly coupled resonators can achieve significantly higher measuring resolution.
In recent years, the mode localisation phenomenon of weakly coupled resonators has been successfully utilised to improve the sensitivity of microelectromechanical system (MEMS) sensors. However, controversy remians about the resolution limits of mode-localised sensors. This paper asks two questions of the community: what are the resolution limits of the mode-localised sensors, and can the resolution improvement be obtained using mode-localised sensing? To answer these questions, we report a series of resolution models of mode-localised sensors. We conclude that mode-localised sensing can realise a higher measuring resolution by orders of magnitude when more than three resonators are weakly coupled, and this will lay the theoretical foundation for a breakthrough for the MEMS sensors industry.
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