期刊
REVIEW OF SCIENTIFIC INSTRUMENTS
卷 92, 期 1, 页码 -出版社
AMER INST PHYSICS
DOI: 10.1063/5.0033465
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资金
- Innovation Fund Denmark (project TRIM)
- Topsil
A four-probe setup was proposed for measuring the temperature of Joule-heated silicon in two independent ways, which were compared to optical temperature measurements. The results showed a high degree of self-consistency between the two methods at temperatures above 1400 K.
We present a four-probe setup for measuring temperature of Joule-heated silicon in two independent ways from the same voltage measurement: a method using the thermal dependence of resistivity and a method based on the measured sheet power density. The two methods are compared to optical temperature measurements made by fitting a gray-body model onto data from a commercial spectrometer. The two four-probe temperature measurements are conducted from 890 K to 1540 K, and they converge at temperatures above 1400 K indicating a high degree of self-consistency.
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