期刊
PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE
卷 218, 期 3, 页码 -出版社
WILEY-V C H VERLAG GMBH
DOI: 10.1002/pssa.202000439
关键词
InGaAs; photoFETs; shortwave infrared
资金
- JSPS KAKENHI [17H06148]
The research found that InGaAs photo field-effect transistors on Si exhibit higher and broader responsivity characteristics compared to InGaAs photodiodes.
InGaAs photo field-effect transistor (photoFET) on Si is the most promising candidate for a high responsivity shortwave infrared (SWIR) photodetector toward monolithic integration with Si-LSI. To evaluate spectral responsivity characteristics of front-side illumination (FSI) InGaAs photoFETs integrated on Si wafer, the photocurrent measurement system with a wide area SWIR illumination is developed. This allows us to extract more accurate incident power density illuminating on the whole sensing area. From the incident power dependence of the responsivity, the spectral responsivity characteristics at a constant incident power are derived. It is found that the spectral responsivity characteristics of InGaAs photoFETs on Si present higher and broader responsivity than that of InGaAs photodiode.
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