期刊
OPTICS EXPRESS
卷 29, 期 4, 页码 4755-4769出版社
Optica Publishing Group
DOI: 10.1364/OE.414953
关键词
-
类别
资金
- Key Research Program of Frontier Sciences, CAS [QYZDJ-SSW-JSC038]
- Bureau of International Cooperation, Chinese Academy of Sciences [181722KYSB20180015]
- National Natural Science Foundation of China [11803037, 61805243]
- Youth Innovation Promotion Association of the Chinese Academy of Sciences [2019221]
The study utilizes finite element and ray tracing models to assess the impact of stress-induced deformation on lightweight silicon carbide mirrors, with results aligning closely with experimental findings. Various strategies to overcome stress-induced deformation are discussed, including fabrication pre-compensation and lightweight structure redesign.
Large aperture, lightweight optics are frequently utilized in modern optical systems. However, despite the use of advanced techniques for developing their materials, fabrication, and mechanical structure, the coatings placed on the substrates induce slight lattice mismatches and increase the thin film stress on polished surfaces. This significantly distorts nano-accuracy optical surfaces, especially on lightweight freeform surfaces. In this study, we construct a finite element model (FEM) and a ray tracing model to estimate the impact of the stress-induced deformation of the coating on a 1.5m class lightweight silicon carbine (SiC) mirror with a freeform surface. Our simulation results are within 10% deviation from the experimental results, and the deformation texture map matches these results as well. We discuss several possible strategies to overcome stress-induced deformation, including fabrication pre-compensation, lightweight structure redesign, and an inverse print-through effect. (C) 2021 Optical Society of America under the terms of the OSA Open Access Publishing Agreement
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据