期刊
OPTICS AND LASERS IN ENGINEERING
卷 139, 期 -, 页码 -出版社
ELSEVIER SCI LTD
DOI: 10.1016/j.optlaseng.2020.106281
关键词
Grating tiling; Mosaic errors; Separation detection; Measurement uncertainty; Mosaic accuracy
类别
资金
- National Key R&D Program of China [2016YFF0102006]
- National Natural Science Foundation of China (NSFC) [61975255, 61605204, 61505204]
- Key Technological Research Project of Jilin Province [20190302047GX]
- Bethune Medical Engineering and Instrument Center Project [BQEGCZX2019017]
- National Youth Program Foundation of China [61805233]
- Jilin Province Outstanding Youth Project in China [20180520190JH]
- Jilin Province Science and Technology Development Plan Project [20180201035GX, 20200404197YY]
- Jilin Province [2018SYHZ0014]
- Chinese Academy of Sciences [2018SYHZ0014]
The article introduces a new method for separation detection and correction of mosaic errors in mosaic gratings based on two detection lights with different incident angles, and designs a corresponding error detection system. Through analyzing the experimental results, high-precision measurements and mosaic of the grating wavefront are successfully achieved.
Grating filing is an important fabrication technology for large-size gratings. However, when using grating filing technology to form large-size echelle gratings, the interferometer cannot detect the grating's zero-order diffraction wavefront because the zero-order diffraction light of the echelle grating is weak. This prevents use of the zero-order and non-zero-order diffraction light of the grating to realize separation detection and correction of mosaic errors. To solve this problem, a new method for separation detection and correction of mosaic errors in mosaic gratings based on two detection lights with the same diffraction order but different incident angles is proposed and a mosaic error detection system is designed. Then, the correction steps for mosaic errors are summarized and the error in mosaic error detection system is analyzed. Finally, the measurement uncertainty in detecting the wavefront of the mosaic grating and the mosaic accuracy of the grating wavefront are analyzed. The uncertainty is 0.008 lambda (lambda=632.8 nm) and the mosaic accuracy of the peak-to-valley wavefront is 0.069 lambda, which shows that high-precision measurements of the wavefront and high-precision mosaic of the wavefront were successfully achieved. The proposed method can be used for the mosaic of all blazed gratings.
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