期刊
JOURNAL OF PHYSICS D-APPLIED PHYSICS
卷 54, 期 15, 页码 -出版社
IOP Publishing Ltd
DOI: 10.1088/1361-6463/abdc91
关键词
absolute ion density; APPJ; molecular beam mass spectrometer
资金
- National Science Foundation [CBET 1703439]
- US Department of Energy, Office of Science, Office of Fusion Energy Sciences General Plasma Science program [DE-SC0020232, DE-SC0001939]
This study calibrated the absolute densities of cold ions in the afterglow region of an atmospheric pressure plasma jet, and found that positive ion densities were significantly lower than those of dominant reactive neutral species. The results demonstrate the capability of molecular beam mass spectrometry to quantitatively evaluate both neutral and ionic species in various applications using APPJs.
Atmospheric pressure plasma jets (APPJs) can enable large fluxes of reactive species impinging on treated substrates in many applications. The relative importance of ionic versus neutral reactive species fluxes produced by APPJs is to date mainly deduced from modeling due to the challenge of measuring absolute ion densities/fluxes. In this study, a calibration was performed to determine the absolute densities of cold ions in the afterglow region of an radiofrequency-driven APPJ in Ar + 1% O-2 by molecular beam mass spectrometry. Positive ion densities were found to be about 3-4 orders of magnitudes lower than the densities of the dominant reactive neutral species (O, O-2(a(1)Delta(g)), O-3) in the afterglow region of the APPJ at a distance larger than 2 mm from the visible plasma plume. The results illustrate the ability of molecular beam mass spectrometry to enable a quantitative evaluation of both neutral and ionic species in many applications using APPJs.
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