期刊
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
卷 29, 期 6, 页码 1421-1430出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JMEMS.2020.3022557
关键词
Micromirrors; Strain; Micromechanical devices; Optical imaging; Optical polarization; Mathematical model; MEMS; PZT; micromirror; piezoelectric; nonlinear dynamics; reduced order models
In this work, we address the modelling of piezo-micromirrors with large opening angles. We focus on various sources of nonlinearites induced by the interaction with the surrounding fluid and by occurrence of geometric large transformations. Specific attention is also devoted to the piezoelectric coupling coefficient. Piezoelectric thin films have gained attention as key materials for the actuation of micro devices since they provide high drive forces, enabling devices with higher performances compared to electrostatic actuation. However they also induce material nonlinearities that cannot be neglected. The model is validated using experimental data obtained for various excitation levels. [2020-0229]
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