4.6 Review

Review on advances in microcrystalline, nanocrystalline and ultrananocrystalline diamond films-based micro/nano-electromechanical systems technologies

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Article Materials Science, Multidisciplinary

Nanoelectromechanical switch fabricated from single crystal diamond: Experiments and modeling

Meiyong Liao et al.

DIAMOND AND RELATED MATERIALS (2012)

Article Materials Science, Multidisciplinary

The valuable role of renucleation rate in ultrananocrystalline diamond growth

D. C. Barbosa et al.

DIAMOND AND RELATED MATERIALS (2012)

Article Materials Science, Multidisciplinary

Fabrication technology for single-material MEMS using polycrystalline diamond

Zongliang Cao et al.

DIAMOND AND RELATED MATERIALS (2010)

Article Materials Science, Multidisciplinary

Status review of the science and technology of ultrananocrystalline diamond (UNCD™) films and application to multifunctional devices

Orlando Auciello et al.

DIAMOND AND RELATED MATERIALS (2010)

Article Physics, Applied

Residual stress analysis in chemical-vapor-deposition diamond films

T. Liu et al.

APPLIED PHYSICS LETTERS (2009)

Article Materials Science, Multidisciplinary

Influence of substrate temperature on formation of ultrananocrystalline diamond films deposited by HFCVD argon-rich gas mixture

D. C. Barbosa et al.

DIAMOND AND RELATED MATERIALS (2009)

Article Engineering, Electrical & Electronic

A Novel Diamond Microprobe for Neuro-Chemical and -Electrical Recording in Neural Prosthesis

Ho-Yin Chan et al.

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2009)

Article Engineering, Electrical & Electronic

Static and dynamic determination of the mechanical properties of nanocrystalline diamond micromachined structures

E. Sillero et al.

JOURNAL OF MICROMECHANICS AND MICROENGINEERING (2009)

Article Chemistry, Multidisciplinary

Controllable Growth of Nanocrystalline Diamond Films by Hot-Filament Chemical Vapor Deposition Method

Yunlong Li et al.

JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY (2009)

Article Materials Science, Multidisciplinary

Mechanical stiffness and dissipation in ultrananocrystalline diamond microresonators

V. P. Adiga et al.

PHYSICAL REVIEW B (2009)

Article Materials Science, Multidisciplinary

Nanocrystalline diamond piezoresistive sensor

Pavel Kulha et al.

VACUUM (2009)

Proceedings Paper Engineering, Electrical & Electronic

Piezoresistive Sensor Technology for RFMEMS using p-type Polycrystalline Diamond

Zongliang Cao et al.

2009 IEEE NANOTECHNOLOGY MATERIALS AND DEVICES CONFERENCE (2009)

Article Chemistry, Physical

Electrical and piezoresistive properties of ion beam deposited DLC films

S. Meskinis et al.

APPLIED SURFACE SCIENCE (2008)

Review Electrochemistry

The CVD of nanodiamond materials

James E. Butler et al.

CHEMICAL VAPOR DEPOSITION (2008)

Article Materials Science, Multidisciplinary

Nanodiamond lateral field emitter devices on thick insulator substrates for reliable high power applications

K. Subramanian et al.

DIAMOND AND RELATED MATERIALS (2008)

Article Materials Science, Multidisciplinary

Fabrication and field emission properties of ultra-nanocrystalline diamond lateral emitters

Yan-Lun Liou et al.

DIAMOND AND RELATED MATERIALS (2008)

Article Materials Science, Multidisciplinary

Microwave plasma-assisted etching of diamond

D. T. Tran et al.

DIAMOND AND RELATED MATERIALS (2008)

Article Materials Science, Multidisciplinary

ICP etching of polycrystalline diamonds: Fabrication of diamond nano-tips for AFM cantilevers

H. Uetsuka et al.

DIAMOND AND RELATED MATERIALS (2008)

Article Materials Science, Multidisciplinary

Unusual morphology of CVD diamond surfaces after RIE

Maria D. Stoikou et al.

DIAMOND AND RELATED MATERIALS (2008)

Article Materials Science, Multidisciplinary

Characteristics of ZnO thin film surface acoustic wave devices fabricated using nanocrystalline diamond film on silicon substrates

Wen-Ching Shih et al.

DIAMOND AND RELATED MATERIALS (2008)

Article Acoustics

1.52-GHz micromechanical extensional wine-glass-mode ring resonators

Yuan Xie et al.

IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL (2008)

Article Engineering, Electrical & Electronic

High-performance polycrystalline diamond micro- and nanoresonators

Nelson Sepulveda et al.

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2008)

Article Chemistry, Analytical

Gas sensing properties of hydrogen-terminated diamond

A. Helwig et al.

SENSORS AND ACTUATORS B-CHEMICAL (2008)

Article Materials Science, Multidisciplinary

Relationship between texture and residual macro-strain in CVD diamond films based on phenomenological analysis

Weimin Mao et al.

JOURNAL OF UNIVERSITY OF SCIENCE AND TECHNOLOGY BEIJING (2008)

Article Materials Science, Multidisciplinary

Field emission devices for advanced electronics comprised of lateral nanodiamond or carbon nanotube emitters

K. Subramanian et al.

DIAMOND AND RELATED MATERIALS (2007)

Article Engineering, Biomedical

Ultrananocrystalline diamond film as an optimal cell interface for biomedical applications

Piyush Bajaj et al.

BIOMEDICAL MICRODEVICES (2007)

Article Physics, Applied

High quality factor gigahertz frequencies in nanomechanical diamond resonators

Alexei Gaidarzhy et al.

APPLIED PHYSICS LETTERS (2007)

Article Engineering, Electrical & Electronic

Optical properties of nanocrystalline diamond films from mid-infrared to ultraviolet using reflectometry and ellipsometry

Z. G. Hu et al.

JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS (2007)

Article Materials Science, Multidisciplinary

Evaluation of diamond gauge factor up to 500 °C

Akira Yamamoto et al.

DIAMOND AND RELATED MATERIALS (2007)

Article Materials Science, Multidisciplinary

Longitudinal and transversal piezoresistive effect in hydrogenated amorphous carbon films

A. Tibrewala et al.

THIN SOLID FILMS (2007)

Article Engineering, Electrical & Electronic

The piezoresistive effect in diamond-like carbon films

A. Tibrewala et al.

JOURNAL OF MICROMECHANICS AND MICROENGINEERING (2007)

Article Engineering, Electrical & Electronic

Diamond and diamond-like carbon MEMS

J. K. Luo et al.

JOURNAL OF MICROMECHANICS AND MICROENGINEERING (2007)

Article Physics, Applied

Scaling of dissipation in megahertz-range micromechanical diamond oscillators

Matthias Imboden et al.

APPLIED PHYSICS LETTERS (2007)

Article Materials Science, Multidisciplinary

Nanocrystalline diamond lateral field emission diode fabrication by dual micropatterning technique

K. Subramanian et al.

DIAMOND AND RELATED MATERIALS (2007)

Article Materials Science, Multidisciplinary

Cycle of two-step etching process using ICP for diamond MEMS applications

Takatoshi Yamada et al.

DIAMOND AND RELATED MATERIALS (2007)

Article Materials Science, Multidisciplinary

Nanowhiskers formation by radio frequency ArO2 plasma etching of aluminum coated diamond films

C. Y. Li et al.

THIN SOLID FILMS (2007)

Article Engineering, Electrical & Electronic

A nanocrystalline CVD diamond film as an x-ray radiation detector

Linjun Wang et al.

SEMICONDUCTOR SCIENCE AND TECHNOLOGY (2007)

Article Materials Science, Multidisciplinary

XRD stress analysis of CVD diamond coatings on SiC substrates

S. Chowdhury et al.

INTERNATIONAL JOURNAL OF REFRACTORY METALS & HARD MATERIALS (2007)

Article Materials Science, Multidisciplinary

The application of polycrystalline diamond in a thin film packaging process for MEMS resonators

Xiangwei Zhu et al.

DIAMOND AND RELATED MATERIALS (2006)

Article Materials Science, Multidisciplinary

Formation of low-resistance contact between titanium and lightly doped polycrystalline diamond using highly doped interlayer

Yuxing Tang et al.

DIAMOND AND RELATED MATERIALS (2006)

Article Materials Science, Multidisciplinary

Nanodiamond lateral comb array field emission diode for high current applications

K. Subramanian et al.

DIAMOND AND RELATED MATERIALS (2006)

Article Materials Science, Multidisciplinary

Nanocrystalline diamond resonator array for R-F signal processing

Jeffrey W. Baldwin et al.

DIAMOND AND RELATED MATERIALS (2006)

Article Materials Science, Multidisciplinary

Pre-nucleation techniques for enhancing nucleation density and adhesion of low temperature deposited ultra-nanocrystalline diamond

Yen-Chih Lee et al.

DIAMOND AND RELATED MATERIALS (2006)

Article Materials Science, Multidisciplinary

Ion beam synthesis of the diamond like carbon films for nanoimprint lithography applications

S. Meskinis et al.

THIN SOLID FILMS (2006)

Article Engineering, Electrical & Electronic

Micro force sensor with piezoresistive amorphous carbon strain gauge

E. Peiner et al.

SENSORS AND ACTUATORS A-PHYSICAL (2006)

Article Engineering, Electrical & Electronic

Piezoresistive gauge factor of hydrogenated amorphous carbon films

A. Tibrewala et al.

JOURNAL OF MICROMECHANICS AND MICROENGINEERING (2006)

Article Materials Science, Multidisciplinary

Comparison of the growth and properties of ultrananocrystalline diamond and nanocrystalline diamond

O. A. Williams et al.

DIAMOND AND RELATED MATERIALS (2006)

Article Materials Science, Multidisciplinary

CVD diamond thin film technology for MEMS packaging

XW Zhu et al.

DIAMOND AND RELATED MATERIALS (2006)

Article Materials Science, Multidisciplinary

Study of polycrystalline diamond piezoresistive position sensors for application in cochlear implant probe

YX Tang et al.

DIAMOND AND RELATED MATERIALS (2006)

Article Materials Science, Multidisciplinary

Geometrical field enhancement on micropatterned nanodiamond film for electron emissions

K Subramanian et al.

DIAMOND AND RELATED MATERIALS (2006)

Article Materials Science, Multidisciplinary

Polycrystalline diamond MEMS resonator technology for sensor applications

N Sepulveda et al.

DIAMOND AND RELATED MATERIALS (2006)

Article Materials Science, Multidisciplinary

Electrochemical properties of undoped hydrogen terminated CVD diamond

CE Nebel et al.

DIAMOND AND RELATED MATERIALS (2006)

Article Materials Science, Multidisciplinary

Effect of metal coating on the formation of diamond whiskers in O2 RF plasma

CY Li et al.

DIAMOND AND RELATED MATERIALS (2006)

Article Materials Science, Multidisciplinary

Nanocrystalline diamond films for surface acoustic wave devices

O Elmazria et al.

DIAMOND AND RELATED MATERIALS (2006)

Article Materials Science, Multidisciplinary

Mechanical dissipation at elevated temperatures in tetrahedral amorphous carbon oscillators

DA Czaplewski et al.

DIAMOND AND RELATED MATERIALS (2006)

Article Chemistry, Analytical

High performance CVD-diamond-based thermocouple for gas sensing

A Balducci et al.

SENSORS AND ACTUATORS B-CHEMICAL (2005)

Article Materials Science, Multidisciplinary

Nanodiamond planar lateral field emission diode

K Subramanian et al.

DIAMOND AND RELATED MATERIALS (2005)

Article Materials Science, Multidisciplinary

Preparation of diamond whiskers using Ar/O2 plasma etching

CY Li et al.

DIAMOND AND RELATED MATERIALS (2005)

Article Materials Science, Multidisciplinary

Micromachining of CVD diamond by RIE for MEMS applications

GF Ding et al.

DIAMOND AND RELATED MATERIALS (2005)

Article Chemistry, Physical

Anisotropic dry etching of boron doped single crystal CVD diamond

J Enlund et al.

CARBON (2005)

Article Engineering, Electrical & Electronic

Ohmic contacts on p-type homoepitaxial diamond and their thermal stability

YG Chen et al.

SEMICONDUCTOR SCIENCE AND TECHNOLOGY (2005)

Review Engineering, Electrical & Electronic

Diamond semiconductor technology for RF device applications

Y Gurbuz et al.

SOLID-STATE ELECTRONICS (2005)

Article Engineering, Electrical & Electronic

Electrical properties of [100]-oriented CVD diamond film

QF Su et al.

SOLID-STATE ELECTRONICS (2005)

Article Materials Science, Multidisciplinary

Pressure sensor using p-type polycrystalline diamond piezoresistors

A Yamamoto et al.

DIAMOND AND RELATED MATERIALS (2005)

Article Materials Science, Multidisciplinary

An all-diamond inkjet realized in sacrificial layer technology

R Müller et al.

DIAMOND AND RELATED MATERIALS (2005)

Article Materials Science, Multidisciplinary

Effect of processing parameters on the nucleation behavior of nano-crystalline diamond film

YC Lee et al.

DIAMOND AND RELATED MATERIALS (2005)

Article Chemistry, Analytical

Diamond microelectronic gas sensor for detection of benzene and toluene

Y Gurbuz et al.

SENSORS AND ACTUATORS B-CHEMICAL (2004)

Article Materials Science, Multidisciplinary

Piezoresistive effect of CVD polycrystalline diamond films

A Yamamoto et al.

DIAMOND AND RELATED MATERIALS (2004)

Article Materials Science, Multidisciplinary

Elements for surface microfluidics in diamond

R Müller et al.

DIAMOND AND RELATED MATERIALS (2004)

Article Materials Science, Multidisciplinary

Freestanding CVD diamond elaborated by pulsed-microwave-plasma for ZnO/diamond SAW devices

T Lamara et al.

DIAMOND AND RELATED MATERIALS (2004)

Article Materials Science, Multidisciplinary

Diamond vacuum field emission devices

W Kang et al.

DIAMOND AND RELATED MATERIALS (2004)

Article Materials Science, Multidisciplinary

'nano-rods' of single crystalline diamond

Y Ando et al.

DIAMOND AND RELATED MATERIALS (2004)

Article Physics, Applied

Dissipation in nanocrystalline-diamond nanomechanical resonators

AB Hutchinson et al.

APPLIED PHYSICS LETTERS (2004)

Article Materials Science, Multidisciplinary

Surface acoustic wave devices based on nanocrystalline diamond and aluminium nitride

F Bénédic et al.

DIAMOND AND RELATED MATERIALS (2004)

Article Materials Science, Multidisciplinary

Electron cyclotron resonance oxygen plasma etching of diamond

M Bernard et al.

DIAMOND AND RELATED MATERIALS (2004)

Article Instruments & Instrumentation

Modeling and analysis of micro piezoelectric power generators for micro-electromechanical-systems applications

F Lu et al.

SMART MATERIALS AND STRUCTURES (2004)

Article Physics, Applied

Low temperature growth of ultrananocrystalline diamond

X Xiao et al.

JOURNAL OF APPLIED PHYSICS (2004)

Article Instruments & Instrumentation

A neutron sensor based on single crystal CVD diamond

GJ Schmid et al.

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT (2004)

Article Acoustics

1.156-GHz self-aligned vibrating micromechanical disk resonator

W Jing et al.

IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL (2004)

Article Physics, Applied

Thin polycrystalline diamond for low-energy x-ray detection

G Conte et al.

JOURNAL OF APPLIED PHYSICS (2004)

Article Engineering, Electrical & Electronic

The fabrication of all-diamond packaging panels with built-in interconnects for wireless integrated microsystems

XW Zhu et al.

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2004)

Article Materials Science, Multidisciplinary

New etching process for device fabrication using diamond

DS Hwang et al.

DIAMOND AND RELATED MATERIALS (2004)

Article Engineering, Electrical & Electronic

Fabrication of diamond-like amorphous carbon cantilever resonators

DHC Chua et al.

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B (2004)

Article Neurosciences

Brain responses to micro-machined silicon devices

DH Szarowski et al.

BRAIN RESEARCH (2003)

Article Engineering, Electrical & Electronic

A low frequency electrical test set-up for the reliability assessment of capacitive RF MEMS switches

WM van Spengen et al.

JOURNAL OF MICROMECHANICS AND MICROENGINEERING (2003)

Article Materials Science, Multidisciplinary

Mechanical properties of ultrananocrystalline diamond thin films relevant to MEMS/NEMS devices

HD Espinosa et al.

EXPERIMENTAL MECHANICS (2003)

Article Engineering, Electrical & Electronic

Diamond metallization for device applications

M Werner

SEMICONDUCTOR SCIENCE AND TECHNOLOGY (2003)

Article Materials Science, Multidisciplinary

Diamond switch using new thermal actuation principle

P Schmid et al.

DIAMOND AND RELATED MATERIALS (2003)

Article Materials Science, Multidisciplinary

Bias enhanced nucleation of diamond on silicon (100) in a HFCVD system

K Janischowsky et al.

DIAMOND AND RELATED MATERIALS (2003)

Article Physics, Applied

Elastic, mechanical, and thermal properties of nanocrystalline diamond films

J Philip et al.

JOURNAL OF APPLIED PHYSICS (2003)

Article Materials Science, Multidisciplinary

Interfacial structure, residual stress and adhesion of diamond coatings deposited on titanium

YQ Fu et al.

THIN SOLID FILMS (2003)

Article Engineering, Industrial

Patterning of diamond microstructures on Si substrate by bulk and surface micromachining

YQ Fu et al.

JOURNAL OF MATERIALS PROCESSING TECHNOLOGY (2003)

Article Materials Science, Multidisciplinary

Fabrication of 2-mu m wide poly-crystalline diamond channels using silicon molds for micro-fluidic applications

S Guillaudeu et al.

DIAMOND AND RELATED MATERIALS (2003)

Article Physics, Applied

Nanomechanical resonant structures in nanocrystalline diamond

L Sekaric et al.

APPLIED PHYSICS LETTERS (2002)

Article Engineering, Industrial

Precise patterning of diamond films for MEMS application

XD Wang et al.

JOURNAL OF MATERIALS PROCESSING TECHNOLOGY (2002)

Article Physics, Applied

Low-loss diamond surface acoustic wave devices using small-grain poly-crystalline diamond

T Uemura et al.

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS (2002)

Article Materials Science, Multidisciplinary

Diamond microwave micro relay

M Adamschik et al.

DIAMOND AND RELATED MATERIALS (2002)

Article Physics, Applied

Analysis of residual stress in diamond films by x-ray diffraction and micro-Raman spectroscopy

NG Ferreira et al.

JOURNAL OF APPLIED PHYSICS (2002)

Article Materials Science, Multidisciplinary

Implantation-doping of diamond with B+, C+, N+ and O+ ions using low temperature annealing

JF Prins

DIAMOND AND RELATED MATERIALS (2002)

Article Materials Science, Multidisciplinary

Optimised contact-structures for metal-diamond-metal UV-detectors

S Salvatori et al.

DIAMOND AND RELATED MATERIALS (2002)

Article Materials Science, Multidisciplinary

Ion beam etching of CVD diamond film in Ar, Ar/O-2 and Ar/CF4 gas mixtures

PW Leech et al.

DIAMOND AND RELATED MATERIALS (2002)

Article Materials Science, Multidisciplinary

Etching of p- and n-type doped monocrystalline diamond using an ECR oxygen plasma source

M Bernard et al.

DIAMOND AND RELATED MATERIALS (2002)

Article Materials Science, Multidisciplinary

Smooth and high-rate reactive ion etching of diamond

Y Ando et al.

DIAMOND AND RELATED MATERIALS (2002)

Article Materials Science, Multidisciplinary

A study on the conduction path in undoped polycrystalline diamond films

BJ Lee et al.

DIAMOND AND RELATED MATERIALS (2001)

Article Materials Science, Multidisciplinary

Ultrananocrystalline diamond thin films for MEMS and moving mechanical assembly devices

AR Krauss et al.

DIAMOND AND RELATED MATERIALS (2001)

Article Materials Science, Multidisciplinary

The use of CVD-diamond for heavy-ion detection

E Berdermann et al.

DIAMOND AND RELATED MATERIALS (2001)

Article Materials Science, Multidisciplinary

Anisotropic etching of a fine column on a single crystal diamond

Y Nishibayashi et al.

DIAMOND AND RELATED MATERIALS (2001)

Article Materials Science, Multidisciplinary

Analysis of piezoresistive properties of CVD-diamond films on silicon

M Adamschik et al.

DIAMOND AND RELATED MATERIALS (2001)

Article Materials Science, Multidisciplinary

Positive dc bias-enhanced diamond nucleation with high CH4 concentration

MJ Chiang et al.

DIAMOND AND RELATED MATERIALS (2001)

Article Materials Science, Multidisciplinary

Reactive ion etching of diamond in CF4, O2, O2 and Ar-based mixtures

PW Leech et al.

JOURNAL OF MATERIALS SCIENCE (2001)

Article Materials Science, Multidisciplinary

Diamond surface conductivity experiments and photoelectron spectroscopy

J Ristein et al.

DIAMOND AND RELATED MATERIALS (2001)

Article Materials Science, Multidisciplinary

Diamond UV detectors for future solar physics missions

JF Hochedez et al.

DIAMOND AND RELATED MATERIALS (2001)

Article Materials Science, Multidisciplinary

Stress study of HFCVD boron-doped diamond films by X-ray diffraction measurements

NG Ferreira et al.

DIAMOND AND RELATED MATERIALS (2001)

Article Materials Science, Multidisciplinary

Fabrication and characterization of phosphorus-doped diamond field emitters in triode-type field emission arrays

CF Chen et al.

DIAMOND AND RELATED MATERIALS (2001)

Article Materials Science, Multidisciplinary

Fabrication of diamond nano-whiskers

ES Baik et al.

THIN SOLID FILMS (2000)

Article Materials Science, Multidisciplinary

Control of diamond micro-tip geometry for field emitter

ES Baik et al.

THIN SOLID FILMS (2000)

Article Physics, Multidisciplinary

Origin of surface conductivity in diamond

F Maier et al.

PHYSICAL REVIEW LETTERS (2000)

Article Nanoscience & Nanotechnology

Residual stresses in chemical vapor deposition free-standing diamond films by X-ray diffraction analyses

O Durand et al.

MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING (2000)

Article Materials Science, Multidisciplinary

Residual stresses in chemical vapour deposited diamond films

QH Fan et al.

DIAMOND AND RELATED MATERIALS (2000)

Article Materials Science, Coatings & Films

Effects of pre-treatments and interlayers on the nucleation and growth of diamond coatings on titanium substrates

YQ Fu et al.

SURFACE & COATINGS TECHNOLOGY (2000)

Article Engineering, Electrical & Electronic

Boron-doped diamond thin film sensor for detection of various semiconductor manufacturing gases

T Takada et al.

SENSORS AND ACTUATORS A-PHYSICAL (2000)

Article Materials Science, Multidisciplinary

Interfacial adhesion and toughness of nanostructured diamond coatings

N Toprani et al.

JOURNAL OF MATERIALS RESEARCH (2000)

Article Materials Science, Multidisciplinary

Fast stable visible-blind and highly sensitive CVD diamond UV photodetectors for laboratory and space applications

E Pace et al.

DIAMOND AND RELATED MATERIALS (2000)

Article Physics, Applied

Evaluation of residual stresses in chemical-vapor-deposited diamond films

QH Fan et al.

JOURNAL OF APPLIED PHYSICS (2000)

Article Materials Science, Multidisciplinary

Aligned diamond nanowhiskers

ES Baik et al.

JOURNAL OF MATERIALS RESEARCH (2000)

Article Materials Science, Multidisciplinary

Surface micromachined diamond microswitch

S Ertl et al.

DIAMOND AND RELATED MATERIALS (2000)

Article Materials Science, Multidisciplinary

Emission current influence of gated structure and diamond emitter morphologies in triode-type field emission arrays

CF Chen et al.

DIAMOND AND RELATED MATERIALS (2000)

Article Materials Science, Multidisciplinary

Electrical properties of chemical vapor deposition diamond films and electrical response to X-ray

LJ Wang et al.

DIAMOND AND RELATED MATERIALS (2000)

Review Engineering, Electrical & Electronic

Recent developments of diamond detectors for particles and UV radiation

A Mainwood

SEMICONDUCTOR SCIENCE AND TECHNOLOGY (2000)

Article Engineering, Electrical & Electronic

Micromachining of diamond film for MEMS applications

T Shibata et al.

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2000)

Article Engineering, Electrical & Electronic

VHF free-free beam high-Q micromechanical resonators

K Wang et al.

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2000)