期刊
DIAMOND AND RELATED MATERIALS
卷 69, 期 -, 页码 1-7出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.diamond.2016.06.015
关键词
Irradiation; Damage; Swelling; Nanostructuring; Ion
类别
资金
- ALBA synchrotron
- Spanish Ministry of Economy and Competitiveness [MAT-2011-28379-C03-02]
- TECHNOFUSION(II)CM of the Community of Madrid [S2013/MAE2745]
- Moncloa Campus of International Excellence (UCM-UPM) foundation
- DiNaMo - National Institute of Nuclear Physics [157660]
- FIRB Futuro in Ricerca project (CUP) - MIUR [D11J11000450001]
- A.Di.N-Tech. project (CUP) - University of Torino and Compagnia di San Paolo [D15E13000130003]
- Dia.Fab. experiment
- European Research Council (ERC StG Ideas BIHSNAM) [279985]
- European Research Council (ERC PoC KNOTOUGH) [2013-2, 632277]
- European Research Council (ERC PoC SILKENE) [693670]
- European Commission under the Graphene Flagship (Nanocomposites) [604391]
- BIHSNAM
- Spanish MINECO through the Severo Ochoa Program [SEV-2015-0496, MAT2013-47869-C4-1-P]
- European Research Council (ERC) [279985] Funding Source: European Research Council (ERC)
This paper presents experimental data and analysis of the structural damage caused by swift-heavy ion irradiation of single-crystal diamond. The patterned buried structural damage is shown to generate, via swelling, a mirror-pattern on the samplesurface, which remains largely damage-free. While extensive results are available for light ion implantations, this effect is reported here for the first time in the heavy ion regime, where a completely differentrange of input parameters (in terms of ion species, energy, stopping power, etc.) is available for customized irradiation. The chosen ion species are Au and Br, in the energy range 10-40 MeV. The observed patterns, as characterized by profilometry and atomic force microscopy, are reported in a series of model experiments, which show swelling patterns ranging from a few nm to above 200 nm. Moreover, a systematic phenomenological modeling is presented, in which surface swelling Measurements are correlated to buried crystal damage. A comparison is made with data for light ion implantations, showing good compatibility with the proposed models. The modeling presented in this work can be useful for the design and realization of micropatterned surfaces in single crystal diamond, allowing generating highly customized structures by combining appropriately chosen irradiation parameters and masks. (C) 2016 Elsevier B.V. All rights reserved.
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