4.6 Article

Impacts of Radius on the Characteristics of Cylindrical Ferroelectric Capacitors

期刊

IEEE TRANSACTIONS ON ELECTRON DEVICES
卷 67, 期 12, 页码 5810-5814

出版社

IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/TED.2020.3033779

关键词

3-D displays; cylindrical ferroelectric capacitor (CFE-cap); HfO2; scaling

资金

  1. National Natural Science Foundation of China [61804003, 61674008]

向作者/读者索取更多资源

As a typical cell structure, the cylindrical ferroelectric capacitor (CFE-cap) has been widely used in 3-D ferroelectric memories. Unlike planar ferroelectric capacitor, the CFE-cap has nonuniform electric field and polarization distribution. In this article, we investigate the impacts of the radius on the capacitance, field distribution, electrode charge densities of both the isotropic and anisotropic CFE-caps. As the inner radius increases, the CFE-cap behaves more like the planar capacitor with the same ferroelectric thickness. The results indicate that CFE-cap has an additional knob of inner radius R-in to tune its ferroelectric and electric characteristics. We have considered two kinds of CFE-caps, isotropic and anisotropic CFE-caps. The former is found to have stronger ferroelectric response than the latter, such as higher normalized capacitance and larger polarization.

作者

我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。

评论

主要评分

4.6
评分不足

次要评分

新颖性
-
重要性
-
科学严谨性
-
评价这篇论文

推荐

暂无数据
暂无数据