4.5 Article

TiOx-based self-rectifying memory device for crossbar WORM memory array applications

期刊

CHINESE PHYSICS B
卷 30, 期 1, 页码 -

出版社

IOP PUBLISHING LTD
DOI: 10.1088/1674-1056/abc548

关键词

resistive switching memory; write-once-read-many-times (WORM); self-rectifying; crossbar array

资金

  1. National Natural Science Foundation of China [61774079, 61664001]
  2. Science and Technology Plan of Gansu Province, China [20JR5RA307]
  3. Key Research and Development Program of Gansu Province, China [18YF1GA088]

向作者/读者索取更多资源

This paper demonstrates a memory device based on Pt/TiOx/W structure with self-rectifying property for WORM memory application. After programming, the devices exhibit excellent uniformity and remain permanently in the low resistance state. The potential application of TiOx-based WORM memory device in crossbar arrays is shown in the results.
Resistive switching with a self-rectifying feature is one of the most effective solutions to overcome the crosstalk issue in a crossbar array. In this paper, a memory device based on Pt/TiOx/W structure with self-rectifying property is demonstrated for write-once-read-many-times (WORM) memory application. After programming, the devices exhibit excellent uniformity and keep in the low resistance state (LRS) permanently with a rectification ratio as high as 10(4) at +/- 1 V. The self-rectifying resistive switching behavior can be attributed to the Ohmic contact at TiOx/W interface and the Schottky contact at Pt/TiOx interface. The results in this paper demonstrate the potential application of TiOx-based WORM memory device in crossbar arrays.

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