4.6 Article

Large-area growth of MoS2 at temperatures compatible with integrating back-end-of-line functionality

相关参考文献

注意:仅列出部分参考文献,下载原文获取全部文献信息。
Article Nanoscience & Nanotechnology

Insights into Multilevel Resistive Switching in Monolayer MoS2

Shubhadeep Bhattacharjee et al.

ACS APPLIED MATERIALS & INTERFACES (2020)

Article Materials Science, Multidisciplinary

Caveats in obtaining high-quality 2D materials and property characterization

Shruti Subramanian et al.

JOURNAL OF MATERIALS RESEARCH (2020)

Article Nanoscience & Nanotechnology

1T-Phase Titanium Disulfide Nanosheets for Sensing H2S and O2

Neha Sakhuja et al.

ACS APPLIED NANO MATERIALS (2020)

Article Chemistry, Physical

Wafer-scale MOCVD growth of monolayer MoS2 on sapphire and SiO2

Huanyao Cun et al.

NANO RESEARCH (2019)

Article Chemistry, Multidisciplinary

Incorporating Niobium in MoS2 at BEOL-Compatible Temperatures and its Impact on Copper Diffusion Barrier Performance

Rui Zhao et al.

ADVANCED MATERIALS INTERFACES (2019)

Review Materials Science, Multidisciplinary

A roadmap for electronic grade 2D materials

Natalie Briggs et al.

2D MATERIALS (2019)

Article Multidisciplinary Sciences

Enhanced NO2 gas sensing of a single-layer MoS2 by photogating and piezo-phototronic effects

Junmeng Guo et al.

SCIENCE BULLETIN (2019)

Article Chemistry, Multidisciplinary

Thinnest Nonvolatile Memory Based on Monolayer h-BN

Xiaohan Wu et al.

ADVANCED MATERIALS (2019)

Article Nanoscience & Nanotechnology

Quantum confinement-induced semimetal-to-semiconductor evolution in large-area ultra-thin PtSe2 films grown at 400 °C

Lida Ansari et al.

NPJ 2D MATERIALS AND APPLICATIONS (2019)

Proceedings Paper Engineering, Electrical & Electronic

3D Heterogeneous Integration with 2D Materials

Connor McClellan et al.

2019 SILICON NANOELECTRONICS WORKSHOP (SNW) (2019)

Article Chemistry, Analytical

Enhanced room-temperature NH3 gas sensing by 2D SnS2 with sulfur vacancies synthesized by chemical exfoliation

Ziyu Qin et al.

SENSORS AND ACTUATORS B-CHEMICAL (2018)

Article Multidisciplinary Sciences

Zero-static power radio-frequency switches based on MoS2 atomristors

Myungsoo Kim et al.

NATURE COMMUNICATIONS (2018)

Article Chemistry, Multidisciplinary

Optimized single-layer MoS2 field-effect transistors by non-covalent functionalisation

HyunJeong Kim et al.

NANOSCALE (2018)

Article Chemistry, Multidisciplinary

Low-temperature synthesis of 2D MoS2 on a plastic substrate for a flexible gas sensor

Yuxi Zhao et al.

NANOSCALE (2018)

Article Nanoscience & Nanotechnology

Layer-controlled epitaxy of 2D semiconductors: bridging nanoscale phenomena to wafer-scale uniformity

Daniele Chiappe et al.

NANOTECHNOLOGY (2018)

Article Multidisciplinary Sciences

Multi-terminal memtransistors from polycrystalline monolayer molybdenum disulfide

Vinod K. Sangwan et al.

NATURE (2018)

Proceedings Paper Materials Science, Multidisciplinary

Defect Functionalization of MoS2 nanostructures as toxic gas sensors: A review

A. A. Ramanathan

2ND INTERNATIONAL CONFERENCE ON ADVANCED MATERIALS (ICAM-2017) (2018)

Proceedings Paper Engineering, Electrical & Electronic

2D materials: roadmap to CMOS integration

C. Huyghebaert et al.

2018 IEEE INTERNATIONAL ELECTRON DEVICES MEETING (IEDM) (2018)

Article Engineering, Electrical & Electronic

Robust memristors based on layered two-dimensional materials

Miao Wang et al.

NATURE ELECTRONICS (2018)

Article Nanoscience & Nanotechnology

Electrical transport and persistent photoconductivity in monolayer MoS2 phototransistors

Antonio Di Bartolomeo et al.

NANOTECHNOLOGY (2017)

Article Chemistry, Multidisciplinary

3D MoS2 Aerogel for Ultrasensitive NO2 Detection and Its Tunable Sensing Behavior

Hu Long et al.

ADVANCED MATERIALS INTERFACES (2017)

Article Chemistry, Multidisciplinary

Atomic Layer Deposition of Crystalline MoS2 Thin Films: New Molybdenum Precursor for Low-Temperature Film Growth

Miika Mattinen et al.

ADVANCED MATERIALS INTERFACES (2017)

Article Chemistry, Multidisciplinary

UV-Activated MoS2 Based Fast and Reversible NO2 Sensor at Room Temperature

Rahul Kumar et al.

ACS SENSORS (2017)

Article Nanoscience & Nanotechnology

Strain-Gradient Effect in Gas Sensors Based on Three-Dimensional Hollow Molybdenum Disulfide Nanoflakes

Min-A Kang et al.

ACS APPLIED MATERIALS & INTERFACES (2017)

Article Chemistry, Multidisciplinary

Atomically Thin Femtojoule Memristive Device

Huan Zhao et al.

ADVANCED MATERIALS (2017)

Article Physics, Applied

Rhenium-doped MoS2 films

Toby Hallam et al.

APPLIED PHYSICS LETTERS (2017)

Article Physics, Applied

P-type conduction in two-dimensional MoS2 via oxygen incorporation

Adam T. Neal et al.

APPLIED PHYSICS LETTERS (2017)

Article Chemistry, Multidisciplinary

Low-Temperature Atomic Layer Deposition of MoS2 Films

Titel Jurca et al.

ANGEWANDTE CHEMIE-INTERNATIONAL EDITION (2017)

Article Physics, Applied

Chemical vapor deposition of monolayer MoS2 directly on ultrathin Al2O3 for low-power electronics

Hadallia Bergeron et al.

APPLIED PHYSICS LETTERS (2017)

Article Chemistry, Multidisciplinary

High-Performance Hybrid Electronic Devices from Layered PtSe2 Films Grown at Low Temperature

Chanyoung Yim et al.

ACS NANO (2016)

Article Chemistry, Multidisciplinary

Aging of Transition Metal Dichalcogenide Monolayers

Jian Gao et al.

ACS NANO (2016)

Article Chemistry, Multidisciplinary

High Surface Area MoS2/Graphene Hybrid Aerogel for Ultrasensitive NO2 Detection

Hu Long et al.

ADVANCED FUNCTIONAL MATERIALS (2016)

Article Chemistry, Physical

Wafer-scale, conformal and direct growth of MoS2 thin films by atomic layer deposition

Yujin Jang et al.

APPLIED SURFACE SCIENCE (2016)

Article Materials Science, Coatings & Films

Atomic layer deposition of two dimensional MoS2 on 150 mm substrates

Arturo Valdivia et al.

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A (2016)

Article Materials Science, Multidisciplinary

Covalent functionalization of MoS2

Stanislav Presolski et al.

MATERIALS TODAY (2016)

Article Chemistry, Multidisciplinary

Wafer-scale growth of MoS2 thin films by atomic layer deposition

Jung Joon Pyeon et al.

NANOSCALE (2016)

Article Multidisciplinary Sciences

MoS2 transistors with 1-nanometer gate lengths

Sujay B. Desai et al.

SCIENCE (2016)

Article Multidisciplinary Sciences

Low-temperature growth of layered molybdenum disulphide with controlled clusters

Jihun Mun et al.

SCIENTIFIC REPORTS (2016)

Article Nanoscience & Nanotechnology

Chemical Sensing of 2D Graphene/MoS2 Heterostructure device

Byungjin Cho et al.

ACS APPLIED MATERIALS & INTERFACES (2015)

Article Nanoscience & Nanotechnology

Bifunctional Sensing Characteristics of Chemical Vapor Deposition Synthesized Atomic-Layered MoS2

Byungjin Cho et al.

ACS APPLIED MATERIALS & INTERFACES (2015)

Article Chemistry, Multidisciplinary

Highly Enhanced Gas Adsorption Properties in Vertically Aligned MoS2 Layers

Soo-Yeon Cho et al.

ACS NANO (2015)

Article Chemistry, Multidisciplinary

Large-Area Epitaxial Mono layer MoS2

Dumitru Dumcenco et al.

ACS NANO (2015)

Article Chemistry, Multidisciplinary

Basal-Plane Functionalization of Chemically Exfoliated Molybdenum Disulfide by Diazonium Salts

Kathrin C. Knirsch et al.

ACS NANO (2015)

Article Chemistry, Multidisciplinary

Tellurium-Assisted Low-Temperature Synthesis of MoS2 and WS2 Monolayers

Yongji Gong et al.

ACS NANO (2015)

Review Chemistry, Multidisciplinary

Two-dimensional transition metal dichalcogenides as atomically thin semiconductors: opportunities and challenges

Xidong Duan et al.

CHEMICAL SOCIETY REVIEWS (2015)

Article Chemistry, Multidisciplinary

A predictive approach to CVD of crystalline layers of TMDs: the case of MoS2

V. Kranthi Kumar et al.

NANOSCALE (2015)

Article Multidisciplinary Sciences

High-mobility three-atom-thick semiconducting films with wafer-scale homogeneity

Kibum Kang et al.

NATURE (2015)

Article Materials Science, Multidisciplinary

Effect of disorder on Raman scattering of single-layer MoS2

Sandro Mignuzzi et al.

PHYSICAL REVIEW B (2015)

Article Multidisciplinary Sciences

Charge-transfer-based Gas Sensing Using Atomic-layer MoS2

Byungjin Cho et al.

SCIENTIFIC REPORTS (2015)

Article Materials Science, Multidisciplinary

Atomic layer deposition of MoS2 thin films

Robert Browning et al.

MATERIALS RESEARCH EXPRESS (2015)

Article Chemistry, Physical

Gas adsorption on MoS2 monolayer from first-principles calculations

Shijun Zhao et al.

CHEMICAL PHYSICS LETTERS (2014)

Article Chemistry, Multidisciplinary

Bandgap, Mid-Gap States, and Gating Effects in MoS2

Chih-Pin Lu et al.

NANO LETTERS (2014)

Article Chemistry, Multidisciplinary

Novel chemical route for atomic layer deposition of MoS2 thin film on SiO2/Si substrate

Zhenyu Jin et al.

NANOSCALE (2014)

Article Chemistry, Multidisciplinary

Atomic layer deposition of a MoS2 film

Lee Kheng Tan et al.

NANOSCALE (2014)

Article Multidisciplinary Sciences

Transition Metal Dichalcogenide Growth via Close Proximity Precursor Supply

Maria O'Brien et al.

SCIENTIFIC REPORTS (2014)

Article Chemistry, Multidisciplinary

High-Performance Sensors Based on Molybdenum Disulfide Thin Films

Kangho Lee et al.

ADVANCED MATERIALS (2013)

Article Chemistry, Physical

Tunable sulfur desorption in exfoliated MoS2 by means of thermal annealing in ultra-high vacuum

M. Donarelli et al.

CHEMICAL PHYSICS LETTERS (2013)

Article Chemistry, Multidisciplinary

Chemical Vapor Sensing with Mono layer MoS2

F. K. Perkins et al.

NANO LETTERS (2013)

Review Chemistry, Multidisciplinary

The chemistry of two-dimensional layered transition metal dichalcogenide nanosheets

Manish Chhowalla et al.

NATURE CHEMISTRY (2013)

Article Chemistry, Physical

Vapour phase growth and grain boundary structure of molybdenum disulphide atomic layers

Sina Najmaei et al.

NATURE MATERIALS (2013)

Article Materials Science, Multidisciplinary

Possible doping strategies for MoS2 monolayers: An ab initio study

Kapildeb Dolui et al.

PHYSICAL REVIEW B (2013)

Article Physics, Multidisciplinary

Functionalization of monolayer MoS2 by substitutional doping: A first-principles study

Qu Yue et al.

PHYSICS LETTERS A (2013)

Article Multidisciplinary Sciences

Controlled Scalable Synthesis of Uniform, High-Quality Monolayer and Few-layer MoS2 Films

Yifei Yu et al.

SCIENTIFIC REPORTS (2013)

Article Chemistry, Multidisciplinary

Channel Length Scaling of MoS2 MOSFETs

Han Liu et al.

ACS NANO (2012)

Article Chemistry, Multidisciplinary

Synthesis of Large-Area MoS2 Atomic Layers with Chemical Vapor Deposition

Yi-Hsien Lee et al.

ADVANCED MATERIALS (2012)

Article Multidisciplinary Sciences

High-mobility and low-power thin-film transistors based on multilayer MoS2 crystals

Sunkook Kim et al.

NATURE COMMUNICATIONS (2012)

Article Nanoscience & Nanotechnology

Single-layer MoS2 transistors

B. Radisavljevic et al.

NATURE NANOTECHNOLOGY (2011)

Article Chemistry, Multidisciplinary

Anomalous Lattice Vibrations of Single- and Few-Layer MoS2

Changgu Lee et al.

ACS NANO (2010)

Article Nanoscience & Nanotechnology

Roll-to-roll production of 30-inch graphene films for transparent electrodes

Sukang Bae et al.

NATURE NANOTECHNOLOGY (2010)

Review Chemistry, Physical

Nanoionics-based resistive switching memories

RaineR Waser et al.

NATURE MATERIALS (2007)