期刊
NATURE COMMUNICATIONS
卷 11, 期 1, 页码 -出版社
NATURE RESEARCH
DOI: 10.1038/s41467-020-17842-w
关键词
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资金
- National Natural Science Foundation of China (NSFC) [61804103, U1932124]
- National Science and Technology Major Project from Minister of Science and Technology of China [2018AAA0103104]
- National Key R&D Program of China [2017YFA0205002]
- Natural Science Foundation of the Jiangsu Higher Education Institutions of China [18KJA535001]
- Natural Science Foundation of Jiangsu Province of China [BK20170343]
- China Postdoctoral Science Foundation [2017M610346]
- State Key Laboratory of Silicon Materials, Zhejiang University [SKL2018-03]
- Collaborative Innovation Center of Suzhou Nano Science Technology
- Priority Academic Program Development of Jiangsu Higher Education Institutions (PAPD)
- 111 Project
- Joint International Research Laboratory of Carbon-Based Functional Materials and Devices
- National Science and Engineering Research Council (NSERC)
- Canada Research Chairs program (CRC)
As a promising energy converter, the requirement for miniaturization and high-accuracy of triboelectric nanogenerators always remains urgent. In this work, a micro triboelectric ultrasonic device was developed by integrating a triboelectric nanogenerator and microelectro-mechanical systems technology. To date, it sets a world record for the smallest triboelectric device, with a 50 mu m-sized diaphragm, and enables the working frequency to be brought to megahertz. This dramatically improves the miniaturization and chip integration of the triboelectric nanogenerator. With 63 kPa@1 MHz ultrasound input, the micro triboelectric ultrasonic device can generate the voltage signal of 16.8 mV and 12.7 mV through oil and sound-attenuation medium, respectively. It also achieved the signal-to-ratio of 20.54 dB and exhibited the practical potential for signal communication by modulating the incident ultrasound. Finally, detailed optimization approaches have also been proposed to further improve the output power of the micro triboelectric ultrasonic device.
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