期刊
VACUUM
卷 183, 期 -, 页码 -出版社
PERGAMON-ELSEVIER SCIENCE LTD
DOI: 10.1016/j.vacuum.2020.109855
关键词
CdZnTe; Polycrystalline thick film; Physical vapor transport; Vacuum thermal evaporation; Array detectors
资金
- National Natural Science Foundation of China [51802032, 11675029]
Large-area and high-crystallinity CdZnTe (CZT) thick films are grown using a hybrid PVT-VTE method, with an 8 x 8 array pixilated X-ray detector fabricated based on the CZT thick film. The detector exhibits high dark resistivity and estimated mobility-lifetime product, showing potential for X-ray detection and imaging applications at room temperature.
Large-area and high-crystallinity CdZnTe (CZT) thick films are grown by physical vapor transport and vacuum thermal evaporation (PVT-VTE) hybrid method. The structure, morphology and composition of which are characterized by X-ray diffraction, scanning electron microscope, energy dispersive spectroscopy and X-ray photoelectron spectroscopy. The as-grown CZT thick films are polycrystalline with (111) preferential orientation, which has a dense pyramid surface structure and a thickness of 590 mu m. An 8 x 8 array pixilated X-ray detector is fabricated based on the CZT thick film. The average dark resistivity of 8 pixels on the detector diagonal is up to 3.33 x 10(11) Omega cm. The estimated mobility-lifetime product of the CZT array detector is 0.72 x 10(-2) cm(2)V(-1). Film structure makes the corresponding detector reduce the influence of trapping effect on the charge carrier transport along the grain growth direction, which shows a short relaxation time and fast photocurrent response. The results demonstrate that the CZT thick film based array detector has high resistivity and sensitivity, and the potential to develop X-ray detection and imaging device under room temperature environment.
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